SEMICONDUCTOR DIE MOUNT BY CONFORMAL DIE COATING
6 Assignments
0 Petitions
Accused Products
Abstract
A conformal coating on a semiconductor die provides adhesion between the die and a support. No additional adhesive is necessary to affix the die on the support. The conformal coating protects the die during assembly, and serves to electrically insulate the die from electrically conductive parts that the die may contact. The conformal coating may be an organic polymer, such as a parylene, for example. Also, a method for adhering a die onto a support, which may optionally be another die, includes providing a coating of a conformal between the die and the support, and heating the coating between the die and the support. The conformal coating may be provided on a die attach area of a surface of the die, or on a die mount region of a surface of the support, or on both a die attach area of a surface of the die and on a die mount region of a surface of the support; and the conformal coating may be provided following placement of the die on the support.
6 Citations
34 Claims
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1-22. -22. (canceled)
- 23. A method for affixing a die onto a support, comprising providing a die having a conformal coating on a surface thereof, contacting a die attach area of the conformal coating with a die mount region of the support, and heating the die attach area of the conformal coating.
- 26. A method for affixing a die onto a support, comprising providing a die having a conformal coating on a surface thereof, providing a support having a conformal coating on a surface thereof, contacting a die attach area of the conformal coating on the die with a die mount region of the conformal coating on the support, and heating the die attach area of the conformal coating on the die or the die mount region of the conformal coating on the support.
- 29. A method for affixing a die onto a support includes placing the die onto the support, providing a standoff between a die attach surface of the die and a die mount surface of the support, and carrying out a conformal coating process to coat at least the die attach surface and the die mount surface.
Specification