CHEMICAL SENSOR

• US 20140308770A1
• Filed: 06/26/2014
• Published: 10/16/2014
• Est. Priority Date: 09/27/2012
• Status: Active Grant

• Current Assignee: Sensirion AG (Sensirion Holding AG)
• Original Assignee: Sensirion AG (Sensirion Holding AG)
• Inventors: Mayer, Felix, Graf, Markus, Burgi, Lukas
• Granted Patent: US 9,508,823 B2
• Time in Patent Office: Days
• US Class Current: 438/49
• CPC Class Codes: G01N 27/128 Microapparatus
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array
• CPC Class Codes: H01L 29/66 Types of semiconductor device ; Multistep manufacturing processes therefor
• CPC Class Codes: H01L 29/66007 Multistep manufacturing processes

Abstract

In a method for manufacturing a chemical sensor with multiple sensor cells, a substrate is provided and an expansion inhibitor is applied to the substrate for preventing a sensitive material to be applied to an area on the substrate for building a sensitive film of a sensor cell to expand from said area. The sensitive material is provided and the sensitive film is built by contactless dispensing the sensitive material to said area.

Claims

1. Method for manufacturing a chemical sensor with multiple sensor cells, comprising the steps of

providing a substrate,

applying an expansion inhibitor to the substrate for preventing a sensitive material to be applied to an area on the substrate for building a sensitive film of a sensor cell to expand from said area,

providing the sensitive material, and

building the sensitive film by contactless dispensing the sensitive material to said area,

wherein applying the expansion inhibitor includes applying a barrier at edges of said area for preventing the sensitive material to be applied to said area to escape from said area, and wherein the barrier includes a recess in the substrate around said area.

3. Method according to claim 1,

wherein expansion inhibitors are applied to the substrate for preventing the sensitive material to be applied to multiple areas on the substrate for building sensitive films of the multiple sensor cells to expand from said multiple areas, and

wherein the sensitive films are built by contactless dispensing of the sensitive material to said multiple areas.

2. Method for manufacturing a chemical sensor with multiple sensor cells, comprising the steps of

providing a substrate,

applying an expansion inhibitor to the substrate for preventing a sensitive material to be applied to an area on the substrate for building a sensitive film of a sensor cell to expand from said area,

providing the sensitive material, and

building the sensitive film by contactless dispensing the sensitive material to said area,

wherein applying the expansion inhibitor includes applying an electrode pattern to the substrate, and in particular includes applying an electrode pattern to the substrate that confines said area.

4. Method according to claim 2,

wherein expansion inhibitors are applied to the substrate for preventing the sensitive material to be applied to multiple areas on the substrate for building sensitive films of the multiple sensor cells to expand from said multiple areas, and

wherein the sensitive films are built by contactless dispensing of the sensitive material to said multiple areas.