SUBSTRATE EVALUATION APPARATUS AND SUBSTRATE EVALUATION METHOD USING THE SAME
First Claim
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1. A substrate evaluation apparatus comprising:
- a substrate storage portion accommodating a substrate;
a first fastening portion and a second fastening portion are arranged in the substrate storage portion and are each fastened to a side of the substrate;
a driving portion driving the first fastening portion and the second fastening portion; and
a measurement portion measuring electrical characteristics of the substrate through application of an electrical signal to the substrate.
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Abstract
A substrate evaluation apparatus and method which includes a substrate storage portion accommodating a substrate, first and second fastening portions are arranged in the substrate storage portion and are each fastened to a side of the substrate, a driving portion driving the first and second fastening portions, and a measurement portion measuring electrical characteristics of the substrate through application of an electrical signal to the substrate.
16 Citations
16 Claims
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1. A substrate evaluation apparatus comprising:
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a substrate storage portion accommodating a substrate; a first fastening portion and a second fastening portion are arranged in the substrate storage portion and are each fastened to a side of the substrate; a driving portion driving the first fastening portion and the second fastening portion; and a measurement portion measuring electrical characteristics of the substrate through application of an electrical signal to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A substrate evaluation apparatus comprising:
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a chamber accommodating a substrate; a first clamp and a second clamp arranged in the chamber and fastened to a side of the substrate; a piston rod having one end fastened to the first clamp or the second clamp; a connecting rod having one end rotatably fastened to a second end of the piston rod opposite the first clamp or the second clamp; a crank arm rotatably fastened to a second end of the connecting rod; a motor fastened to the crank arm; and a probe electrically connected to the substrate. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A substrate evaluation method comprising:
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arranging a substrate in a sealed chamber; providing at least one deformation of bending folding, rolling, or twisting to the substrate; changing at least one of a temperature environment, a light environment, a gas environment, and a humidity environment, to the substrate; and measuring an electrical characteristic change of the substrate. - View Dependent Claims (16)
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Specification