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SUBSTRATE EVALUATION APPARATUS AND SUBSTRATE EVALUATION METHOD USING THE SAME

  • US 20140333333A1
  • Filed: 08/06/2013
  • Published: 11/13/2014
  • Est. Priority Date: 05/08/2013
  • Status: Abandoned Application
First Claim
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1. A substrate evaluation apparatus comprising:

  • a substrate storage portion accommodating a substrate;

    a first fastening portion and a second fastening portion are arranged in the substrate storage portion and are each fastened to a side of the substrate;

    a driving portion driving the first fastening portion and the second fastening portion; and

    a measurement portion measuring electrical characteristics of the substrate through application of an electrical signal to the substrate.

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