SEMICONDUCTOR DEVICE
First Claim
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1. A method of making a semiconductor device comprising:
- providing an active area comprising a source and a gate;
depositing a gate metal contact above and forming an electrical contact with the gate; and
depositing a source metal contact above and forming an electrical contact with the source and comprising a plurality of metal through contacts positioned adjacent a side of the active area, the plurality of metal through contacts being spaced at intervals from one another and arranged in two or more rows.
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Abstract
A semiconductor device includes an active area having a source and a gate. A gate metal contact is deposited above and forms an electrical contact with the gate and a source metal contact is deposited above and forms an electrical contact with the source. The source metal contact includes a plurality of metal through contacts positioned adjacent a side of the active area, the plurality of metal through contacts being spaced at intervals from one another and arranged in two or more rows.
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6 Claims
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1. A method of making a semiconductor device comprising:
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providing an active area comprising a source and a gate; depositing a gate metal contact above and forming an electrical contact with the gate; and depositing a source metal contact above and forming an electrical contact with the source and comprising a plurality of metal through contacts positioned adjacent a side of the active area, the plurality of metal through contacts being spaced at intervals from one another and arranged in two or more rows. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification