METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
First Claim
Patent Images
1. A method for manufacturing a semiconductor device, comprising:
- adsorbing boron atoms onto a hydrophobic surface of an insulating film containing silicon, carbon, hydrogen and oxygen, which is formed on a substrate and includes a recess formed in the insulating film to expose a conductive path of a lower layer side at a bottom portion thereof, by supplying a gas of a boron compound to the insulating film;
forming an adherence film made of a ruthenium (Ru) film directly on the surface of the insulating film onto which the boron atoms are adsorbed; and
filling copper serving as a conductive path in the recess.
1 Assignment
0 Petitions
Accused Products
Abstract
When a recess is formed in a SiCOH film, C is removed from the film to form a damage layer. If the damage layer is removed by hydrofluoric acid or the like, the surface becomes hydrophobic. By supplying a boron compound gas, a silicon compound gas or a gas containing trimethyl aluminum to the SiCOH film, B, Si or Al is adsorbed on the SiCOH film. These atoms bond with Ru and a Ru film is easily formed on the SiCOH film. The Ru film is formed using, for example, Ru3(CO)12 gas and CO gas. Copper is filled in the recess and an upper side wiring structure is formed by carrying out CMP processing.
7 Citations
9 Claims
-
1. A method for manufacturing a semiconductor device, comprising:
-
adsorbing boron atoms onto a hydrophobic surface of an insulating film containing silicon, carbon, hydrogen and oxygen, which is formed on a substrate and includes a recess formed in the insulating film to expose a conductive path of a lower layer side at a bottom portion thereof, by supplying a gas of a boron compound to the insulating film; forming an adherence film made of a ruthenium (Ru) film directly on the surface of the insulating film onto which the boron atoms are adsorbed; and filling copper serving as a conductive path in the recess. - View Dependent Claims (2, 7)
-
-
3. A method for manufacturing a semiconductor device, comprising:
-
adsorbing silicon atoms onto a hydrophobic surface of an insulating film containing silicon, carbon, hydrogen and oxygen, which is formed on a substrate and includes a recess formed in the insulating film to expose a conductive path of a lower layer side at a bottom portion thereof, by supplying a gas of a silicon compound to the insulating film; forming an adherence film made of a ruthenium (Ru) film directly on the surface of the insulating film onto which the silicon atoms are adsorbed; and filling copper serving as a conductive path in the recess. - View Dependent Claims (4, 8)
-
-
5. A method for manufacturing a semiconductor device, comprising:
-
adsorbing aluminum atoms onto a hydrophobic surface of an insulating film containing silicon, carbon, hydrogen and oxygen, which is formed on a substrate and includes a recess formed in the insulating film to expose a conductive path of a lower layer side at a bottom portion thereof, by supplying a gas of an organic compound containing aluminum to the insulating film; forming an adherence film made of a ruthenium (Ru) film directly on the surface of the insulating film onto which the aluminum atoms are adsorbed; and filling copper serving as a conductive path in the recess. - View Dependent Claims (6, 9)
-
Specification