3D IC Testing Apparatus
First Claim
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1. A method comprising:
- connecting a testing setup having a plurality of probes to a device under test having a plurality of vias, wherein a probe is aligned with a corresponding via of the device under test; and
conducting a plurality of via electrical characteristic tests through a conductive path comprising the vias, the probes and a plurality of conductive devices, each of which connects two adjacent probes, wherein the conductive devices are in the testing setup.
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Abstract
A method comprises connecting a testing setup having a plurality of probes to a device under test having a plurality of vias, wherein a probe is aligned with a corresponding via of the device under test and conducting a plurality of via electrical characteristic tests through a conductive path comprising the vias, the probes and a plurality of conductive devices, each of which connects two adjacent probes, wherein the conductive devices are in the testing setup.
6 Citations
20 Claims
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1. A method comprising:
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connecting a testing setup having a plurality of probes to a device under test having a plurality of vias, wherein a probe is aligned with a corresponding via of the device under test; and conducting a plurality of via electrical characteristic tests through a conductive path comprising the vias, the probes and a plurality of conductive devices, each of which connects two adjacent probes, wherein the conductive devices are in the testing setup. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method comprising:
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providing a device under test comprising a plurality of through vias and at least one connection device coupled between two adjacent through vias; connecting a testing setup having a plurality of probes to the device under test, wherein a probe is aligned with a corresponding via of the device under test and the testing setup comprise a plurality of conductive devices; forming a conductive chain comprising the through vias, the probes, the connection device and the plurality of conductive devices as a result of connecting the testing setup having a plurality of probes to the device under test; and conducting a plurality of via electrical characteristic tests through the conductive chain. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A method comprising:
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providing a plurality of connection devices formed in a testing apparatus; and forming a through silicon via (TSV) chain by coupling a plurality of TSVs in a device under test (DUT) with the plurality of connection devices. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification