ELECTROMAGNETIC RESONATOR PRESSURE SENSOR
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Abstract
The invention relates to a pressure sensor including an electromagnetic resonator with waveguide having a dielectric material with a dielectric permittivity that varies with temperature. There is an excitation circuit configured to propagate an electromagnetic field through the resonator and a device for heating the resonator. There is also a device for detecting the electromagnetic resonant frequency of the resonator and a device for determining the pressure of the gas surrounding the sensor as a function of the detected resonant frequency of the resonator.
5 Citations
30 Claims
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1-15. -15. (canceled)
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16. A pressure sensor, comprising:
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an electromagnetic resonator with a waveguide comprising a dielectric material having a dielectric permittivity that varies with temperature; an excitation circuit configured to propagate an electromagnetic field through said resonator; a device for heating said resonator; a device for detecting an electromagnetic resonant frequency of the resonator; a device for determining a pressure of a gas surrounding the sensor as a function of the detected resonant frequency of the resonator. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A method for measuring the pressure of a gas, comprising:
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placing an electromagnetic resonator in thermal contact with the gas, the waveguide resonator including a dielectric material that has a dielectric permittivity that varies with temperature; heating said resonator; electromagnetically exciting said resonator; and detecting the electromagnetic resonant frequency of the resonator and determining the pressure of the gas as a function of the detected electromagnetic resonant frequency.
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Specification