DEPOSITION OF NON-ISOSTRUCTURAL LAYERS FOR FLEXIBLE SUBSTRATE

  • US 20150159271A1
  • Filed: 12/05/2014
  • Published: 06/11/2015
  • Est. Priority Date: 12/09/2013
  • Status: Abandoned Application
First Claim
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1. A method for depositing a plurality of non-isostructural layers onto a substrate, the method comprising:

  • (a) depositing an inorganic layer onto the substrate, the inorganic layer comprising metal atoms adsorbed to the substrate;

    (b) exposing the inorganic layer on the substrate to a hydrocarbon-containing source precursor to deposit a first hydrocarbon-containing layer by adsorbing the hydrocarbon-containing source precursor onto the inorganic layer; and

    (c) repeating (a) and (b) to form a plurality of layers of inorganic layers and first hydrocarbon-containing layers on the substrate.

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