SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Accused Products
Abstract
There are provided a substrate processing apparatus and a substrate processing method realizing an effective reduction of a voltage change of a substrate on an electrode to reduce the variation of incident energy of ions entering the substrate. The substrate processing apparatus includes: a first electrode holding a substrate on a main surface of the first electrode; a second electrode facing the first electrode; a RF power source applying to the first electrode a RF voltage whose frequency is equal to or higher than 40 MHz; and a pulse voltage applying unit applying to the first electrode a pulse voltage decreasing in accordance with a lapse of time, by superimposing the pulse voltage on the RF voltage.
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Citations
21 Claims
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1-13. -13. (canceled)
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14. A substrate processing apparatus, comprising:
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a chamber; a first electrode disposed in the chamber and having a main surface for placing a substrate thereon; a second electrode disposed in the chamber and facing the first electrode; a radio frequency (RF) power source configured to apply a RF voltage to the first electrode, the RF voltage having a frequency of 40 MHz or higher; and a voltage pulse generator configured to apply a voltage waveform to the first electrode so as to superimpose the voltage waveform on the RF voltage, the voltage waveform having a first period and a second period alternately repeated, the first period including N1 voltage pulses repeated with a break time t1 and a frequency ω
1, and the second period being a break time t2 lacking a voltage pulse, the break time t2 being longer than the break time t1. - View Dependent Claims (15, 16, 17)
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18. A method of processing a substrate, comprising:
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placing a substrate on an electrode in a chamber; applying a radio frequency (RF) voltage to the electrode, the RF voltage having a frequency of 40 MHz or higher; and applying a voltage waveform to the first electrode so as to superimpose the voltage waveform on the RF voltage, the voltage waveform having a first period and a second period alternately repeated, the first period including N1 voltage pulses repeated with a break time t1 and a frequency ω
1, and the second period being a break time t2 lacking a voltage pulse, the break time t2 being longer than the break time t1. - View Dependent Claims (19, 20, 21)
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Specification