PEELING METHOD AND PEELING APPARATUS
First Claim
Patent Images
1. A peeling method comprising the steps of:
- a first step of forming a separation layer over a substrate;
a second step of forming a layer to be separated over the separation layer;
a third step of forming a peeling starting point by separating a part of the layer to be separated from the separation layer;
a fourth step of peeling the layer to be separated from the substrate using the peeling starting point; and
a liquid supplying step of supplying liquid to the peeling starting point,wherein a temperature of the liquid is higher than or equal to 60°
C. and lower than or equal to 90°
C.
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Abstract
An object is to provide a novel peeling method and a novel peeling apparatus. A peeling method including a first step of forming a separation layer over a substrate, a second step of forming a layer to be separated over the separation layer, a third step of forming a peeling starting point by separating part of the layer to be separated from the separation layer, and a fourth step of peeling the layer to be separated from the substrate using the peeling starting point. In the fourth step, the substrate temperature is higher than or equal to 60 degrees Celsius and lower than or equal to 90 degrees Celsius.
14 Citations
21 Claims
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1. A peeling method comprising the steps of:
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a first step of forming a separation layer over a substrate; a second step of forming a layer to be separated over the separation layer; a third step of forming a peeling starting point by separating a part of the layer to be separated from the separation layer; a fourth step of peeling the layer to be separated from the substrate using the peeling starting point; and a liquid supplying step of supplying liquid to the peeling starting point, wherein a temperature of the liquid is higher than or equal to 60°
C. and lower than or equal to 90°
C. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A peeling method comprising the steps of:
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a first step of forming a separation layer over a substrate; a second step of forming a layer to be separated over the separation layer; a third step of forming a peeling starting point by separating a part of the layer to be separated from the separation layer; and a fourth step of peeling the layer to be separated from the substrate using the peeling starting point, wherein in the fourth step, a temperature of the substrate is kept to be higher than or equal to 60°
C. and lower than or equal to 90°
C. - View Dependent Claims (11, 12, 13, 14)
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15. A peeling method comprising the steps of:
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a first step of forming a separation layer over a substrate; a second step of forming a layer to be separated over the separation layer; a third step of forming a peeling starting point by separating a part of the layer to be separated from the separation layer; and a fourth step of peeling the layer to be separated from the substrate using the peeling starting point, wherein in the fourth step, the layer to be separated is peeled from the substrate while at least a part of the layer to be separated is cooled. - View Dependent Claims (16, 17, 18)
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19. A peeling apparatus comprising:
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a structure body; a stage; a liquid supplying mechanism; a first temperature adjustment mechanism; and a second temperature adjustment mechanism, wherein the structure body is capable of holding a first member of a process member, wherein the stage is capable of holding a second member of the process member, wherein the first temperature adjustment mechanism is capable of adjusting a temperature of the structure body, wherein the second temperature adjustment mechanism is capable of adjusting a temperature of the stage, wherein the liquid supplying mechanism is capable of supplying liquid to a separation surface between the first member and the second member, and wherein the peeling apparatus is capable of winding the first member around the structure body to separate the first member from the second member. - View Dependent Claims (20, 21)
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Specification