MICRO-ELECTRO-MECHANICAL TRANSDUCER HAVING AN OPTIMIZED NON-FLAT SURFACE
First Claim
1. A capacitive micromachined ultrasound transducer (cMUT) comprising:
- a first layer having a first electrode; and
a second layer having a second electrode opposing the first electrode to define a gap width therebetween, wherein at least one of the first layer and the second layer includes a flexible layer having a contact area in contact to a support, such that the first electrode and the second electrode are movable relative to each other to cause a change of the gap width; and
wherein the support has two substantially continuous shoulder sides each extending along with the flexible layer, each shoulder side making graduated contact with more contact area of the flexible layer as the flexible layer deforms toward the shoulder side, causing the flexible layer to have a dynamically changing spring strength.
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Accused Products
Abstract
A capacitive micromachined ultrasound transducer (cMUT) is provided. The cMUT has a first layer having a first electrode and a second layer having a second electrode opposing the first electrode to define a gap width therebetween. At least one of the first layer and the second layer includes a flexible layer having a contact area in contact to a support, such that the first electrode and the second electrode are movable relative to each other to cause a change of the gap width. The support has two substantially continuous shoulder sides each extending along with the flexible layer, each shoulder side making graduated contact with more contact area of the flexible layer as the flexible layer deforms toward the shoulder side, causing the flexible layer to have a dynamically changing spring strength.
1 Citation
13 Claims
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1. A capacitive micromachined ultrasound transducer (cMUT) comprising:
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a first layer having a first electrode; and a second layer having a second electrode opposing the first electrode to define a gap width therebetween, wherein at least one of the first layer and the second layer includes a flexible layer having a contact area in contact to a support, such that the first electrode and the second electrode are movable relative to each other to cause a change of the gap width; and
wherein the support has two substantially continuous shoulder sides each extending along with the flexible layer, each shoulder side making graduated contact with more contact area of the flexible layer as the flexible layer deforms toward the shoulder side, causing the flexible layer to have a dynamically changing spring strength. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A capacitive micromachined ultrasound transducer (cMUT) comprising:
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a first layer having a first electrode; and a second layer having a second electrode opposing the first electrode to define a gap therebetween, wherein at least one of the first layer and the second layer comprises a flexible layer having a contact area in contact to a first support step, such that the first electrode and the second electrode are movable relative to each other to cause a change in the gap width; and
wherein the contact area of the flexible layer extends to make contact with additional support steps as the flexible layer deforms toward the shoulder side, causing the flexible layer to have a dynamically changing spring strength. - View Dependent Claims (11, 12, 13)
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Specification