SURFACE-ENHANCED RAMAN SCATTERING ELEMENT

• US 20150211999A1
• Filed: 08/09/2013
• Published: 07/30/2015
• Est. Priority Date: 08/10/2012
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Maruyama, Yoshihiro, Shibayama, Katsumi, Ito, Masashi, Hirohata, Toru, Kamei, Hiroki
• Granted Patent: US 9,976,961 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G01N 21/658 enhancement Raman, e.g. surface plasmons
• CPC Class Codes: G01N 2201/068 Optics, miscellaneous

Abstract

A SERS element comprises a substrate; a fine structure part formed on a front face of the substrate and having a plurality of pillars; and a conductor layer formed on the fine structure part and constituting an optical function part for generating surface-enhanced Raman scattering. The conductor layer has a base part formed along the front face of the substrate and a plurality of protrusions protruding from the base part at respective positions corresponding to the pillars. The base part and the protrusions form a plurality of gaps in the conductor layer, each of the gaps having an interstice gradually decreasing in the projecting direction of the pillar.

Claims

1. :

A surface-enhanced Raman scattering element comprising;

a substrate having a principal surface;

a fine structure part formed on the principal surface and having a plurality of projections; and

a conductor layer formed on the fine structure part and constituting an optical function part for generating surface-enhanced Raman scattering;

wherein the conductor layer has a base part formed along the principal surface and a plurality of protrusions protruding from the base part at respective positions corresponding to the projections; and

wherein the base part and the protrusions form a plurality of gaps in the conductor layer, each of the gaps having an interstice gradually decreasing in the projecting direction of the projection.

2. :

A surface-enhanced Raman scattering element according to claim 1, wherein the projections are arranged periodically along the principal surface.

3. :

A surface-enhanced Raman scattering element according to claim 1, wherein the gaps are formed along a part of the respective projections and each of the gaps have the interstice gradually decreasing at both end parts when seen in the projecting direction of the projections.

4. :

A surface-enhanced Raman scattering element according to claim 3, wherein the gaps are arranged on the same side of the projections corresponding thereto.

5. :

A surface-enhanced Raman scattering element according to claim 1, wherein the interstice of the gap gradually decreases continuously.

6. :

A surface-enhanced Raman scattering element according to claim 1, wherein the protrusion has a form constricted at an end part on the substrate side.

7. :

A surface-enhanced Raman scattering element according to claim 1, wherein the base part has a thickness smaller than a height of the projections.

8. :

A surface-enhanced Raman scattering element according to claim 1, wherein the base part has a thickness greater than a height of the projections.