CROSS-POINT MEMORY AND METHODS FOR FABRICATION OF SAME
First Claim
1. A method of fabricating a memory device, comprising:
- providing a substrate;
forming a memory cell material stack over the substrate, the memory cell including a first active material and a second active material over the first active material, wherein one of the first and second active materials comprises a storage material and the other of the first and second active materials comprises a selector material;
patterning the memory cell material stack, wherein patterning includes;
etching through the one of the first and second active materials of the memory cell material stack,forming protective liners on sidewalls of the at least one of the first and second active materials after etching through the one of the first and second active materials, andfurther etching through the other of the first and second active materials of the memory cell material stack after forming the protective liners.
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Accused Products
Abstract
The disclosed technology relates generally to integrated circuit devices, and in particular to cross-point memory arrays and methods for fabricating the same. In one aspect, a method of fabricating cross-point memory arrays comprises forming a memory cell material stack which includes a first active material and a second active material over the first active material, wherein one of the first and second active materials comprises a storage material and the other of the first and second active materials comprises a selector material. The method of fabricating cross-point arrays further comprises patterning the memory cell material stack, which includes etching through at least one of the first and second active materials of the memory cell material stack, forming protective liners on sidewalls of the at least one of the first and second active materials after etching through the one of the first and second active materials, and further etching the memory cell material stack after forming the protective liners on the sidewalls of the one of the first and second active materials.
121 Citations
28 Claims
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1. A method of fabricating a memory device, comprising:
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providing a substrate; forming a memory cell material stack over the substrate, the memory cell including a first active material and a second active material over the first active material, wherein one of the first and second active materials comprises a storage material and the other of the first and second active materials comprises a selector material; patterning the memory cell material stack, wherein patterning includes; etching through the one of the first and second active materials of the memory cell material stack, forming protective liners on sidewalls of the at least one of the first and second active materials after etching through the one of the first and second active materials, and further etching through the other of the first and second active materials of the memory cell material stack after forming the protective liners. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of fabricating a memory device, comprising:
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providing a substrate; forming a memory cell material stack; patterning the memory cell material stack to form a memory cell structure stack, comprising; partially etching the memory cell material stack to form a shallow trench separating upper portions of the memory cell material stack, forming a protective liner material on sidewall and bottom surfaces of the shallow trench, anisotropically etching the protective liner material to remove the protective liner material from the bottom surface of the shallow trench to form a protective liner spacer on sidewall surfaces of the upper portion, and further etching the memory cell material stack to separate the memory cell material stack into memory cell line stacks after forming the protective liner spacer. - View Dependent Claims (20, 21, 22, 23)
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24. A memory device, comprising:
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a substrate; a lower conductive line disposed above the substrate and extending in a first direction and an upper conductive line disposed above the lower conductive line and extending in the second direction crossing the first direction; and a memory cell stack interposed between the lower and upper conductive lines, the memory cell stack comprising an upper active element and a lower active element, wherein the memory cell stack includes lateral plateau regions when viewed in the first direction such that a width of the memory cell stack immediately below the plateau regions are between about 10% and 50% wider than a width of the memory cell stack immediately above the plateau regions. - View Dependent Claims (25, 26, 27, 28)
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Specification