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METHOD AND APPARATUS FOR IMAGING THREE-DIMENSIONAL STRUCTURE

  • US 20150282903A1
  • Filed: 06/18/2015
  • Published: 10/08/2015
  • Est. Priority Date: 08/05/1998
  • Status: Active Grant
First Claim
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1. An apparatus for determining surface topology of a portion of a three-dimensional structure, the apparatus comprising:

  • a probing member;

    an illumination unit configured to generate a plurality of incident light beams;

    an optical system configured to focus the plurality of incident light beams to a focal plane external to the probing member so as to illuminate the portion of the three-dimensional structure;

    a detector unit configured to measure a characteristic of a plurality of returned light beams generated from illuminating the portion of the three-dimensional structure with the plurality of incident light beams; and

    a processor coupled to the detector unit and configured to determine a surface topology of the portion of the three-dimensional structure based at least in part on the measured characteristic of the plurality of returned light beams.

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