RESILIENT ELECTRICAL INTERPOSERS, SYSTEMS THAT INCLUDE THE INTERPOSERS, AND METHODS FOR USING AND FORMING THE SAME
First Claim
1. A method of increasing a dimensional stability of a plurality of electrical conduits that are contained within a resilient dielectric body of a probe head, wherein the resilient dielectric body includes a first surface and an opposed second surface, wherein each of the plurality of electrical conduits extends from the first surface to the opposed second surface, and further wherein the plurality of electrical conduits is configured to form a plurality of electrical connections with a device under test during testing of the device under test with the probe head, the method comprising:
- stretching the resilient dielectric body from a first configuration to a stretched configuration;
applying the resilient dielectric body to a space transformer, wherein the applying includes maintaining the resilient dielectric body in the stretched configuration, and further wherein the applying includes aligning the plurality of electrical conduits with a plurality of respective contact pads on the space transformer; and
retaining the resilient dielectric body in the stretched configuration subsequent to the applying by adhering the resilient dielectric body to the space transformer with an adhesive.
3 Assignments
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Accused Products
Abstract
Resilient electrical interposers that may be utilized to form a plurality of electrical connections between a first device and a second device, as well as systems that may utilize the resilient electrical interposers and methods of use and/or fabrication thereof. The resilient electrical interposers may include a resilient dielectric body with a plurality of electrical conduits contained therein. The plurality of electrical conduits may be configured to provide a plurality of electrical connections between a first surface of the electrical interposer and/or the resilient dielectric body and a second, opposed, surface of the electrical interposer and/or the resilient dielectric body. The systems and methods disclosed herein may provide for improved vertical compliance, improved contact force control, and/or improved dimensional stability of the resilient electrical interposers.
0 Citations
20 Claims
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1. A method of increasing a dimensional stability of a plurality of electrical conduits that are contained within a resilient dielectric body of a probe head, wherein the resilient dielectric body includes a first surface and an opposed second surface, wherein each of the plurality of electrical conduits extends from the first surface to the opposed second surface, and further wherein the plurality of electrical conduits is configured to form a plurality of electrical connections with a device under test during testing of the device under test with the probe head, the method comprising:
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stretching the resilient dielectric body from a first configuration to a stretched configuration; applying the resilient dielectric body to a space transformer, wherein the applying includes maintaining the resilient dielectric body in the stretched configuration, and further wherein the applying includes aligning the plurality of electrical conduits with a plurality of respective contact pads on the space transformer; and retaining the resilient dielectric body in the stretched configuration subsequent to the applying by adhering the resilient dielectric body to the space transformer with an adhesive. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A probe head, comprising:
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a first device including a plurality of contact pads; a coupon including a resilient dielectric body and a plurality of electrical conduits, wherein the resilient dielectric body includes a first surface and an opposed second surface, wherein each of the plurality of electrical conduits extends from the first surface to the opposed second surface, and further wherein the plurality of electrical conduits is configured to form a plurality of electrical connections with a second device during testing of the second device by the probe head; and wherein the coupon is operatively attached to the first device, and wherein the resilient dielectric body is maintained in a stretched configuration that is different from an undeformed configuration of the resilient dielectric body prior to operative attachment of the coupon to the first device. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. A probe head assembly for electrically contacting a device under test, the probe head assembly comprising:
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a signal conduit that is configured to at least one of provide a test signal to and receive a resultant signal from the device under test; a space transformer in electrical communication with the signal conduit; and a probe head, wherein the probe head includes; (i) a resilient dielectric body that includes a first surface and an opposed second surface; and (ii) a plurality of electrical conduits located within the resilient dielectric body and configured to provide a plurality of electrical connections between the space transformer and the device under test; wherein the probe head further includes a means for decreasing a planar expansion of the probe head when the probe head is compressed between the space transformer and the device under test; and wherein the means for decreasing the planar expansion of the probe head includes a stretched probe head that is formed at a first size and stretched to a second size that is larger than the first size prior to being compressed between the space transformer and the device under test.
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Specification