THICKNESS DETERMINATION AND LAYER CHARACTERIZATION USING TERAHERTZ SCANNING REFLECTOMETRY
First Claim
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1. A terahertz scanning reflectometer for layer thickness determination, comprising:
- a first continuous wave terahertz source configured to generate terahertz radiation toward a reference layer;
a second continuous wave terahertz source configured to generate terahertz radiation toward a target layer;
a first detector configured to detect a reference layer reflected beam;
a second detector configured to detect a target layer reflected beam; and
a processor configured to determine a difference between the reference layer reflected beam and target layer reflected beam.
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Abstract
A terahertz scanning reflectometer system is described herein for in-situ measurement of polymer coating thickness, semiconductor wafer'"'"'s surface sub-surface inspection in a non-destructive and non-invasive fashion with very high resolution (e.g., 25 nm or lower) and spectral profiling and imaging of surface and sub-surface of biological tissues (e.g., skin) in a non-invasive fashion.
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Citations
10 Claims
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1. A terahertz scanning reflectometer for layer thickness determination, comprising:
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a first continuous wave terahertz source configured to generate terahertz radiation toward a reference layer; a second continuous wave terahertz source configured to generate terahertz radiation toward a target layer; a first detector configured to detect a reference layer reflected beam; a second detector configured to detect a target layer reflected beam; and a processor configured to determine a difference between the reference layer reflected beam and target layer reflected beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A terahertz system for analyzing biological tissue, comprising:
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a platform configured to hold a substrate; a continuous wave terahertz source configured to generate terahertz radiation; an off-axis parabolic reflector configured to focus the terahertz radiation at a surface of the substrate; a beam splitter configured to direct a reflected beam from the sample holder to a detection system; a motion controller configured to move the platform, wherein on a condition that the motion controller adjusts a location of a focal point inside the substrate, a reflectance measurement is performed across a thickness of the substrate, wherein a thickness profile is determined from a blank substrate measurement and the biological tissue loaded substrate measurement, and wherein on a condition that the motion controller locks the focal point at the surface of the substrate, a real time reflectance measurement is performable upon placement of the biological tissue on the substrate; a spectrometer configured to measure spectral signatures of the biopsy tissues, wherein a benign and/or healthy tissue is measured and its spectrum is used as reference and a diseased tissue is measured and disease conditions may be assigned to spectral featured in comparison with the benign and/or healthy tissue and wherein spectra are used to identify cancer tumor and benign tumor; and a reconstruction module configured to covert a 3D scan data in to a 3D image of the tissue, wherein the image provides visual differences between the benign and/or healthy and diseased tissues. - View Dependent Claims (10)
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Specification