MASS TRANSFER TOOL
First Claim
Patent Images
1. A mass transfer tool comprising:
- an articulating transfer head assembly including an electrostatic voltage source connection, the electrostatic voltage source connection to electrically connect with an array of electrostatic transfer heads;
a carrier substrate holder; and
an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder.
1 Assignment
0 Petitions
Accused Products
Abstract
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool includes an articulating transfer head assembly, a carrier substrate holder, and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder. The articulating transfer head assembly may include an electrostatic voltage source connection and a substrate supporting an array of electrostatic transfer heads.
2 Citations
20 Claims
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1. A mass transfer tool comprising:
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an articulating transfer head assembly including an electrostatic voltage source connection, the electrostatic voltage source connection to electrically connect with an array of electrostatic transfer heads; a carrier substrate holder; and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification