METHOD FOR PRODUCING ALIGNED CARBON NANOTUBE ASSEMBLY
First Claim
1. A method for producing aligned carbon nanotube aggregates on a substrate supporting a catalyst on a surface of the substrate,the method comprising the following steps carried out by use of a production apparatus including:
- a growth unit including a growth furnace for growing therein the aligned carbon nanotube aggregates; and
first gas mixing prevention means, which includes a first seal gas ejection section and a first exhaust section, for preventing gas present outside the growth furnace from flowing into the growth furnace;
a gas mixing prevention step for (a) ejecting a seal gas from the first seal gas ejection section along an opening plane of at least one of (i) an opening of the growth furnace through which opening the substrate is transferred into the growth furnace and (ii) an opening of the growth furnace through which opening the substrate is transferred out of the growth furnace and (b) sucking and exhausting the seal gas out of the production apparatus from the first exhaust section, so that the seal gas does not flow into the growth furnace through the opening of the growth furnace; and
a growing step for growing the aligned carbon nanotube aggregates in the growth unit.
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Abstract
Provided is a production apparatus (100) for continuously producing aligned carbon nanotube aggregates on a substrate supporting a catalyst while continuously transferring the substrate. The production apparatus (100) includes gas mixing prevention means (12, 13) for preventing gas present outside a growth furnace (3a) from flowing into the growth furnace (3a). The gas mixing prevention means (12, 13) includes a seal gas ejection section (12b, 13b) so that the seal gas does not flow into the growth furnace through the openings of the growth furnace. The production apparatus prevents the outside air from flowing into the production apparatus, uniformly controls, within a range suitable to production of CNTs, a concentration distribution(s) and a flow rate distribution(s) of a raw material gas and/or a catalyst activation material on the substrate, and does not disturb gas flow as much as possible in the growth furnace.
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Citations
5 Claims
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1. A method for producing aligned carbon nanotube aggregates on a substrate supporting a catalyst on a surface of the substrate,
the method comprising the following steps carried out by use of a production apparatus including: - a growth unit including a growth furnace for growing therein the aligned carbon nanotube aggregates; and
first gas mixing prevention means, which includes a first seal gas ejection section and a first exhaust section, for preventing gas present outside the growth furnace from flowing into the growth furnace;a gas mixing prevention step for (a) ejecting a seal gas from the first seal gas ejection section along an opening plane of at least one of (i) an opening of the growth furnace through which opening the substrate is transferred into the growth furnace and (ii) an opening of the growth furnace through which opening the substrate is transferred out of the growth furnace and (b) sucking and exhausting the seal gas out of the production apparatus from the first exhaust section, so that the seal gas does not flow into the growth furnace through the opening of the growth furnace; and a growing step for growing the aligned carbon nanotube aggregates in the growth unit. - View Dependent Claims (2, 3, 4, 5)
- a growth unit including a growth furnace for growing therein the aligned carbon nanotube aggregates; and
Specification