METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT HAVING A COMMON MODE FILTER MONOLITHICALLY INTEGRATED WITH A PROTECTION DEVICE
First Claim
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1. A method for manufacturing a semiconductor component having a common mode filter monolithically integrated with a protection device, comprising:
- providing a semiconductor material having a major surface and a resistivity of at least 5 ohm-centimeters;
forming a plurality of trenches in the semiconductor material;
forming the protection device from the semiconductor material between first and second trenches of the plurality of trenches; and
monolithically integrating a common mode filter with the protection device.
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Abstract
In accordance with an embodiment, a semiconductor component, includes a common mode filter monolithically integrated with a protection device. The common mode filter includes a plurality of coils and the protection device has a terminal coupled to a first coil and another terminal coupled to a second coil.
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Citations
20 Claims
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1. A method for manufacturing a semiconductor component having a common mode filter monolithically integrated with a protection device, comprising:
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providing a semiconductor material having a major surface and a resistivity of at least 5 ohm-centimeters; forming a plurality of trenches in the semiconductor material; forming the protection device from the semiconductor material between first and second trenches of the plurality of trenches; and monolithically integrating a common mode filter with the protection device.
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2. The method of claim 2, wherein providing the semiconductor material comprises:
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providing a semiconductor substrate having a resistivity of at least 10 ohm-centimeters; forming a first epitaxial layer of a first conductivity type over the semiconductor substrate; and forming a second epitaxial layer of a second conductivity type over the first epitaxial layer. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9)
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10. A method for manufacturing a semiconductor component having a common mode filter monolithically integrated with a protection device, comprising:
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providing a semiconductor material having a major surface and a resistivity of at least 5 ohm-centimeters; forming a first trench in the semiconductor material, wherein the first trench extends from the major surface into a first portion of the semiconductor material and separates a second portion of the semiconductor material from a third portion of the semiconductor material; forming a first semiconductor device from the second portion of the semiconductor material; forming a second semiconductor device from the third portion of the semiconductor material, the sir semiconductor device electrically coupled to the second semiconductor device; forming a first layer of dielectric material over the major surface; and forming a first opening in the first layer of dielectric material; and forming a common mode filter over the semiconductor material, the common mode filter monolithically integrated with the first semiconductor device and having a first coil contact structure electrically contacting the first semiconductor device. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A method for manufacturing a semiconductor component having a common mode filter monolithically integrated with a protection device, comprising:
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providing a semiconductor material of a first conductivity type and having a major surface and a resistivity of at least 5 ohm-centimeters; forming a first trench in the semiconductor material, wherein the first trench extends from the major surface into a first portion of the semiconductor material and separates a second portion of the semiconductor material from a third portion of the semiconductor material; forming a second trench in the semiconductor material, wherein the second trench extends from the major surface into a fourth portion of the semiconductor material and separates the third portion of the semiconductor material from a fifth portion of the semiconductor material; forming a third trench in the semiconductor material, wherein the third trench extends from the major surface into a sixth portion of the semiconductor material and separates the fifth portion of the semiconductor material from a seventh portion of the semiconductor material; forming a first semiconductor device from the second portion of the semiconductor material; forming a second semiconductor device from the third portion of the semiconductor material, the second semiconductor device electrically coupled to the first semiconductor device; forming a third semiconductor device from the fifth portion of the semiconductor material, the third semiconductor device electrically coupled to the second semiconductor device; forming a first layer of dielectric material over the major surface; and forming a first opening in the first layer of dielectric material and a second opening in the first layer of dielectric material; and forming a common mode filter over the semiconductor material, the common mode filter monolithically integrated with the first semiconductor device, the second semiconductor device, and the third semiconductor device and having a first coil contact structure electrically contacting the first semiconductor device and a second coil contact structure electrically contacting the second semiconductor device. - View Dependent Claims (19, 20)
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Specification