Method and Apparatus for Electrostatic Mode-Alignment on Planar MEMS Gyroscopes
First Claim
Patent Images
1. An apparatus comprising:
- a resonant body having a first height dimension value h1 and an exterior perimeter surface; and
a plurality of electrodes disposed adjacent the exterior perimeter surface of the resonant body,wherein at least one of the plurality of electrodes is an alignment electrode and has a second height dimension value h2 that is less than the first height dimension value h1 of the resonant body.
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Abstract
A MEMS BAW vibratory planar gyroscope having an in-plane electrode configuration for mode-alignment by utilizing alignment electrodes that have a height less than a full height of the gyroscope resonant body. Such alignment electrodes apply a force component that affects modes with both in-plane and out-of-plane movements. The gyroscope includes a resonant body having a height and a perimeter surface and electrodes disposed adjacent the exterior perimeter surface of the resonant body. At least one of the electrodes is an alignment electrode and has a height less than the height of the resonant body.
3 Citations
26 Claims
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1. An apparatus comprising:
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a resonant body having a first height dimension value h1 and an exterior perimeter surface; and a plurality of electrodes disposed adjacent the exterior perimeter surface of the resonant body, wherein at least one of the plurality of electrodes is an alignment electrode and has a second height dimension value h2 that is less than the first height dimension value h1 of the resonant body. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An apparatus comprising:
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a resonant body defined by a first height dimension value h1 and an exterior perimeter, the resonant body having a vibratory mode characterized by a plurality of in-plane mode anti-node locations and a plurality of out-of-plane mode anti-node locations on the resonant body; and at least one electrode disposed at a location about the exterior perimeter of the resonant body where an in-plane mode antinode location and an out-of-plane mode anti-node location coincide. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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16. A method of making a MEMS apparatus, comprising:
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A) forming a resonant body having a first height dimension value h1 and an exterior perimeter surface; and B) disposing at least one electrode adjacent the exterior perimeter surface of the resonant body, wherein the at least one of the electrodes is an alignment electrode and has a second height dimension value h2 that is less than the first height dimension value h1 of the resonant body. - View Dependent Claims (17, 18, 19, 20)
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21. A gyroscope, comprising:
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a resonant body having a first height dimension value h1 and an exterior perimeter surface, the resonant body having a vibratory mode characterized by a plurality of in-plane mode anti-node locations and a plurality of out-of-plane mode anti-node locations on the resonant body; an opening defined in the resonant body; a first plurality of side electrodes disposed adjacent the resonant body, each side electrode having a same height as the first height dimension value h1; at least one alignment electrode disposed adjacent the resonant body at a location where an in-plane mode antinode location and an out-of-plane mode anti-node location coincide, wherein the at least one alignment electrode has a second height dimension value h2 that is less than the first height dimension value h1. - View Dependent Claims (22, 23, 24, 25, 26)
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Specification