MULTI-PASS VACUUM COATING SYSTEMS

• US 20160369403A1
• Filed: 09/02/2016
• Published: 12/22/2016
• Est. Priority Date: 12/27/2007
• Status: Active Grant

• Current Assignee: Exatec, LLC (Government of Saudi Arabia)
• Original Assignee: Exatec, LLC (Government of Saudi Arabia)
• Inventors: Gasworth, Steven Marc
• Granted Patent: US 10,344,384 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence
• CPC Class Codes: C23C 16/4408 by purging residual gases from the reaction chamber or gas lines
• CPC Class Codes: C23C 16/4409 characterised by sealing means
• CPC Class Codes: C23C 16/50 using electric discharges generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating
• CPC Class Codes: H01J 2237/3321 CVD [Chemical Vapor Deposition]
• CPC Class Codes: H01J 37/32743 for introducing the material into processing chamber
• CPC Class Codes: H01J 37/32752 for moving the material across the discharge
• CPC Class Codes: H01J 37/32816 Pressure
• CPC Class Codes: H01L 21/67173 in-line arrangement
• CPC Class Codes: H01L 21/67745 characterized by movements or sequence of movements of transfer devices

Abstract

A method for coating substrates with multiple coating layers can comprise: establishing a sub-atmospheric pressure within a coating system; transferring each substrate from outside the coating system to inside the coating system though a transfer lock; heating each substrate in a heating zone before entering a coating zone; traversing the coating zone in a first direction of movement and applying a first coating layer to each substrate in the coating zone using expanding thermal plasma type of plasma enhanced chemical vapor deposition; traversing the coating zone a second time and applying a second coating layer to each substrate in the coating zone using expanding thermal plasma type of plasma enhanced chemical vapor deposition; determining if the coating zone is occupied or vacant; if the coating zone is vacant, purging a heater zone module with inert gas; and pumping the inert gas out of the coating zone through ports located in the coating zone.

Claims

1. A method for coating substrates with multiple coating layers, the method comprising:

establishing a sub-atmospheric pressure within a coating system;

transferring each substrate from outside the coating system to inside the coating system though a transfer lock;

traversing a coating zone in a first direction of movement and applying a first coating layer to each substrate in the coating zone using expanding thermal plasma type of plasma enhanced chemical vapor deposition;

traversing the coating zone a second time and applying a second coating layer to each substrate in the coating zone using expanding thermal plasma type of plasma enhanced chemical vapor deposition; and

transferring each substrate from inside the coating system to outside the system through the transfer lock; and

purging a heater zone module with inert gas depending on whether the coating zone is occupied or vacant; and

pumping the inert gas out of the coating zone through ports located in the coating zone.

2. The method of claim 1, wherein the coating system has one coating zone.

3. The method of claim 1, wherein the heating zone is located upstream of the coating zone.

4. The method of claim 1, wherein the heating zone is located between a transfer lock and the coating zone.

5. The method of claim 1, wherein the step of traversing the coating zone a second time is performed in a second direction of movement, the second direction of movement being different than the first direction of movement.

6. The method of claim 1, further comprising the step of reversing the direction of movement of the substrates through the system.

7. The method of claim 5, wherein the reversing step includes receiving and holding a plurality of substrates and then dispensing the substrates in the second direction.

8. The method of claim 1, wherein multiple substrates are moved through the system simultaneously.

9. The method of claim 1, further comprising the step of traversing the coating zone more than two times and applying more than two coating layers onto the substrates.

10. The method of claim 9, wherein the step of traversing the coating zone more than two times includes traversing the coating zone at least one time without applying a corresponding coating to the substrates.

11. The method of claim 1, wherein the step of traversing the coating zone a second time is performed in a second direction of movement, the second direction of movement being different than the first direction of movement.

12. The method of claim 11, wherein the second direction of movement is opposite in direction to the first direction of movement.

13. The method of claim 1, further comprising, prior to coating the substrate, heating each substrate in a heating zone to a temperature suitable for coating.

14. A method for coating substrates with multiple coating layers, comprising:

establishing a sub-atmospheric pressure within a coating system;

transferring each substrate from outside the coating system to inside the coating system though a transfer lock;

heating each substrate in a heating zone before entering a coating zone;

traversing the coating zone in a first direction of movement and applying a first coating layer to each substrate in the coating zone using expanding thermal plasma type of plasma enhanced chemical vapor deposition;

traversing the coating zone a second time and applying a second coating layer to each substrate in the coating zone using expanding thermal plasma type of plasma enhanced chemical vapor deposition;

determining if the coating zone is occupied or vacant;

if the coating zone is vacant, purging a heater zone module with inert gas; and

pumping the inert gas out of the coating zone through ports located in the coating zone.

15. The method of claim 14, wherein the coating system has one coating zone.

16. The method of claim 14, wherein the heating zone is located between a transfer lock and the coating zone.