HIGH INTEGRITY PROCESS FLUID PRESSURE PROBE
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Abstract
A process fluid pressure measurement probe includes a pressure sensor formed of a single-crystal material and mounted to a first metallic process fluid barrier and disposed for direct contact with a process fluid. The pressure sensor has an electrical characteristic that varies with process fluid pressure. A feedthrough is formed of a single-crystal material and has a plurality of conductors extending from a first end to a second end. The feedthrough is mounted to a second metallic process fluid barrier and is spaced from, but electrically coupled to, the pressure sensor. The pressure sensor and the feedthrough are mounted such that the secondary metallic process fluid barrier is isolated from process fluid by the first metallic process fluid barrier.
3 Citations
24 Claims
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1-16. -16. (canceled)
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17. A process fluid pressure measurement probe comprising:
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a flange mountable to a process fluid conduit and having an aperture therethrough; an inner conduit having a pair of ends, a first end being welded to the flange; an outer conduit having a pair of ends, a first end being welded to the flange; an isolator plug welded to a second end of the inner conduit and to a second end of the outer conduit, the isolator plug having a passageway therethrough; an isolation diaphragm welded to the isolator plug, the isolation diaphragm being adapted for exposure to a process fluid; a pressure sensor module welded to the isolator plug, the pressure sensor module defining a chamber therein and having a conduit in fluidic communication with the passageway of the isolator plug; a pressure sensor mounted within the chamber, the pressure sensor having an electrical characteristic that varies with process fluid pressure; a fill fluid surrounding the pressure sensor within the chamber, the fill fluid coupling pressure from the isolation diaphragm to the pressure sensor; a plurality of leads coupled to the pressure sensor an extending therefrom through the aperture of the flange and being coupleable to a process pressure transmitter. - View Dependent Claims (18, 19, 20, 21)
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22. A process fluid pressure measurement probe comprising:
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a pressure sensor mounted to a first metallic process fluid barrier and having an electrical characteristic that varies with process fluid pressure; a feedththrough formed of a single crystal material and having a plurality of conductors extending from a first end to a second end, the feedthrough being mounted to a second metallic process fluid barrier and being spaced from, but electrically coupled to, the pressure sensor; and wherein the pressure sensor and the feedthrough are mounted such that the secondary metallic process fluid barrier is isolated from process fluid by the first metallic process fluid barrier. - View Dependent Claims (23, 24)
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Specification