POLISHING SLURRY COMPOSITION
First Claim
Patent Images
1. A polishing slurry composition comprising:
- at least two types of abrasive particles among first abrasive particles, second abrasive particles, and third abrasive particles; and
an oxidizer,wherein a peak-to-valley roughness Rpv decreases when a contact area between the abrasive particles and a tungsten-containing film increases.
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Abstract
A polishing slurry composition is provided. The polishing slurry composition includes at least two types of abrasive particles among first abrasive particles, second abrasive particles, and third abrasive particles, and an oxidizer. A peak-to-valley roughness Rpv decreases when a contact area between the abrasive particles and a tungsten-containing film increases.
3 Citations
18 Claims
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1. A polishing slurry composition comprising:
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at least two types of abrasive particles among first abrasive particles, second abrasive particles, and third abrasive particles; and an oxidizer, wherein a peak-to-valley roughness Rpv decreases when a contact area between the abrasive particles and a tungsten-containing film increases. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A tungsten polishing slurry composition for polishing tungsten, the tungsten polishing slurry composition comprising:
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at least two types of abrasive particles among first abrasive particles, second abrasive particles, and third abrasive particles, wherein a specific surface area of the abrasive particles satisfies the following conditional expression;
20 m2/g≦
(TA×
KA)+(TB×
KB)+(TC×
KC)≦
100 m2/g,wherein TA, TB and TC denote a specific surface area of the first abrasive particles, a specific surface area of the second abrasive particles, and a specific surface area of the third abrasive particles, respectively, one of the specific surface areas TA, TB, and TC has a value of “
0,”
KA, KB and KC denote a ratio of an amount of the first abrasive particles to a total amount of the abrasive particles, a ratio of an amount of the second abrasive particles to the total amount of the abrasive particles and a ratio of an amount of the third abrasive particles to the total amount of the abrasive particles, respectively, and 0≦
KA<
1, 0≦
KB<
1, and 0≦
KC<
1 are satisfied. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification