Determining One or More Characteristics of a Pattern of Interest on a Specimen

• US 20170059491A1
• Filed: 08/22/2016
• Published: 03/02/2017
• Est. Priority Date: 08/24/2015
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation
• Original Assignee: KLA-Tencor Corporation
• Inventors: Lennek, Michael, Duffy, Brian, Kulkarni, Ashok, Park, Allen
• Granted Patent: US 10,359,371 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G01N 2021/95615 with stored comparision signal
• CPC Class Codes: G01N 2021/95676 Masks, reticles, shadow masks
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01N 21/95607 using a comparative method
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/001 using an image reference approach
• CPC Class Codes: H01L 22/12 for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions electrical measurement of diffusions H01L22/14
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

Methods and systems for determining characteristic(s) of patterns of interest (POIs) are provided. One system is configured to acquire output of an inspection system generated at the POI instances without detecting defects at the POI instances. The output is then used to generate a selection of the POI instances. The system then acquires output from an output acquisition subsystem for the selected POI instances. The system also determines characteristic(s) of the POI using the output acquired from the output acquisition subsystem.

Claims

1. A system configured to determine one or more characteristics of a pattern of interest on a specimen, comprising:

an output acquisition subsystem comprising at least an energy source and a detector, wherein the output acquisition subsystem is configured to direct energy generated by the energy source to a specimen while the detector detects energy from the specimen and generates output responsive to the detected energy; and

a computer subsystem comprising one or more processors configured to execute instructions from a memory medium, wherein the computer subsystem is configured for;

acquiring output of an inspection system generated by the inspection system for at least a majority of instances of a pattern of interest on the specimen and stored in a computer-readable storage medium, wherein the inspection system acquires the output at a resolution that is lower than a resolution of the output acquisition subsystem, and wherein the inspection system stores the output acquired at the at least the majority of instances regardless of characteristics of the output;

selecting one or more of the at least the majority of instances at which the output is generated by the output acquisition subsystem, wherein said selecting is performed based on the characteristics of the output of the inspection system;

acquiring the output generated by the output acquisition subsystem for the selected one or more of the at least the majority of instances,

wherein the resolution of the output acquisition subsystem with which the output is acquired at the selected one or more of the at least the majority of instances is higher than the resolution of the inspection system; and

determining one or more characteristics of the pattern of interest based on the output of the output acquisition subsystem at the selected one or more of the at least the majority of instances.

2. The system of claim 1, wherein the one or more characteristics of the pattern of interest determined based on the output of the output acquisition subsystem are not detectable in any output generated by the inspection system.

3. The system of claim 1, wherein the inspection system identifies the locations of the at least the majority of the instances of the pattern of interest on the specimen without detecting defects on the specimen, and wherein selecting the One or more of the at least the majority of instances is not performed based on defects detected at the instances of the pattern of interest.

4. The system of claim 1, wherein the instances of the pattern of interest on the specimen are located by the inspection system with sub-pixel accuracy.

5. The system of claim 1, wherein the output for the selected one or more of the at least the majority of instances is generated by the output acquisition subsystem by locating the selected one or more of the at least the majority of instances with sub-pixel accuracy.

6. The system of claim 1, wherein said determining the one or more characteristics is performed based on the output of the output acquisition subsystem at the selected one or more of the at least the majority of instances in combination with the output of the inspection system generated for at least one of the instances of the pattern of interest.

7. The system of claim 1, wherein said determining the one or more characteristics comprises determining one or more initial values for the one or more characteristics of the pattern of interest based on the output of the output acquisition subsystem at the selected one or more of the at least the majority of instances in combination with a first portion of the output of the inspection system generated for at least one of the instances of the pattern of interest and, based on the one or more initial values, selecting a second portion of the output of the inspection system generated for at least one of the instances of the pattern of interest stored in the computer-readable storage medium and determining the one or more characteristics of the pattern of interest based on the output of the output acquisition subsystem at the selected one or more of the at least the majority of instances in combination with the second portion of the output of the inspection system generated for the at least one of the instances of the pattern of interest.

8. The system of claim 1, wherein the computer subsystem is further configured for determining a variation in the one or more characteristics of the pattern of interest and determining a source of the variation based on the variation.

9. The system of claim 1, wherein the determined one or more characteristics of the pattern of interest correspond to only patterning deviations in the pattern of interest.

10. The system of claim 1, wherein the characteristics of the output of the inspection system comprise characteristics of raw image data generated by the inspection system for the at least the majority of the instances of the pattern of interest.

11. The system of claim 1, wherein the compute subsystem is further configured for determining one or more relationships between one or more of the characteristics of the output of the inspection system and the one or more characteristics of the pattern of interest and determining one or more parameters used for the selecting based on the one or more relationships.

12. The system of claim 11, wherein determining the one or more relationships is performed using machine learning.

13. The system of claim 11, wherein the computer subsystem is further configured for performing data reduction on the output of the inspection system for the at least the majority of instances of the pattern of interest used for determining the one or more relationships by identifying a first portion of the at least the majority of instances, wherein the first portion includes fewer than all of the at least the majority of the instances, and wherein determining the one or more relationships is performed based on only the one or more characteristics of the output generated by the inspection system for the first portion of the at least the majority of instances.

14. The system of claim 11, wherein the computer subsystem is further configured for performing data reduction on the output of the inspection system for the at least the majority of the instances of the pattern of interest used for determining the one or more relationships by identifying a first portion of the output of the inspection system for the at least the majority of instances that is optically relevant and eliminating a second portion of the output of the inspection system for the at least the majority of instances that is not optically relevant, and wherein the first portion of the output of the inspection system comprises the output of the inspection system corresponding to actual defects in the instances of the pattern of interest.

15. The system of claim 11, wherein the computer subsystem is further configured for determining one or more characteristics of the one or more relationships, and wherein determining the one or more parameters used for the selecting is performed based on the one or more characteristics of the one or more relationships.

16. The system of claim 15, wherein the one or more parameters used for the selecting comprise a type of the selecting to be performed.

17. The system of claim 11, wherein the one or more parameters used for the selecting comprise which of the characteristics of the output of the inspection system are used for the selecting.

18. The system of claim 11, wherein the one or more relationships comprise a linear correlation between the one or more of the characteristics of the output of the inspection system and the one or more characteristics of the pattern of interest.

19. The system of claim 11, wherein the one or more relationships comprise a non-linear correlation between the one or more of the characteristics of the output of the inspection system and the one or more characteristics of the pattern of interest.

20. The system of claim 1, wherein the determined one or more characteristics of the pattern of interest comprise one or more quantifiable characteristics of the pattern of interest.

21. The system of claim 1, wherein the system is further configured as a metrology system.

22. The system of claim 1, wherein the computer-readable storage medium is configured as a virtual inspector.

23. The system of claim 1, wherein the inspection system is an optical inspection system.

24. The system of claim 1, wherein the inspection system is an electron beam inspection system.

25. The system of claim 1, wherein the specimen is a wafer.

26. The system of claim 1, wherein the specimen is a reticle.

27. The system of claim 1, wherein the energy source is a light source, and whet-the energy detected by the detector comprises light.

28. The system of claim 1, wherein the energy source is an electron beam source, and wherein the energy detected by the detector comprises electrons.

29. The system of claim 1, wherein the energy source is a charged particle beam source, and wherein the energy detected by the detector comprises charged particles.

30. A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for determining one or more characteristics of a pattern of interest on a specimen, wherein the computer-implemented method comprises:

acquiring output of an inspection system generated by the inspection system for at least a majority of instances of a pattern of interest on a specimen and stored in a computer-readable storage medium, wherein the inspection system acquires the output at a resolution that is lower than a resolution of an output acquisition subsystem, wherein the inspection system stores the output acquired at the at least the majority of instances regardless of characteristics of the output, wherein the output acquisition subsystem comprises at least an energy source and a detector, and wherein the output acquisition subsystem is configured to direct energy generated by the energy source to the specimen while the detector detects energy from the specimen and generates output responsive to the detected energy;

selecting one or more of the at least the majority of instances at which the output is generated by the output acquisition subsystem, wherein said selecting is performed based on the characteristics of the output of the inspection system;

acquiring the output generated by the output acquisition subsystem for the selected one or more of the at least the majority of instances, wherein the resolution of the output acquisition subsystem with which the output is acquired at the selected one or more of the at least the majority of instances is higher than the resolution of the inspection system; and

determining one or more characteristics of the pattern of interest based on the output of the output acquisition subsystem at the selected one or more of the at least the majority of instances, Wherein acquiring the output of the inspection system, selecting the one or more of the at least the majority of instances, acquiring the output generated by the output acquisition subsystem, and determining the one or more characteristics are performed by the computer system, wherein the computer system comprises one or more processors configured to execute the program instructions from the non-transitory computer-readable medium, and wherein the computer system is coupled to the output acquisition subsystem.

31. A computer-implemented method for determining one or more characteristics of a pattern of interest on a specimen, comprising:

acquiring output of an inspection system generated by the inspection system for at least a majority of instances of a pattern of interest on a specimen and stored in a computer-readable storage medium, wherein the inspection system acquires the output at a resolution that is lower than a resolution of an output acquisition subsystem, wherein the inspection system stores the output acquired at the at least the majority of instances regardless of characteristics of the output, wherein the output acquisition subsystem comprises at least an energy source and a detector, and wherein the output acquisition subsystem is configured to direct energy generated by the energy source to the specimen while the detector detects energy from the specimen and generates output responsive to the detected energy;

selecting one or more of the at least the majority of instances at which the output is generated by the output acquisition subsystem, wherein said selecting is performed based on the characteristics of the output of the inspection system;

acquiring the output generated by the output acquisition subsystem for the selected one or more of the at least the majority of instances, wherein the resolution of the output acquisition subsystem with which the output is acquired at the selected one or more of the at least the majority of instances is higher than the resolution of the inspection system; and

determining one or more characteristics of the pattern of interest based on the output of the output acquisition subsystem at the selected one or more of the at least the majority of instances, wherein acquiring the output of the inspection system, selecting the one or more of the at least the majority of instances, acquiring the output generated by the output acquisition subsystem, and determining the one or more characteristics are performed by a computer subsystem coupled to the output acquisition subsystem, and wherein the computer subsystem comprises one or more processors configured to execute instructions from a memory medium.