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Methods for Integrating a Compliant Material with a Substrate

  • US 20170060290A1
  • Filed: 08/28/2015
  • Published: 03/02/2017
  • Est. Priority Date: 08/28/2015
  • Status: Active Grant
First Claim
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1. A method for forming a sensor module, comprising:

  • providing a compliant structure that includes a compliant layer;

    constructing a first substrate layer over a first surface of the compliant structure, wherein the first substrate layer includes a first conductive layer; and

    producing a first substrate tail from a portion of the first substrate layer.

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