Offset-Printing Method for Three-Dimensional Printed Memory with Multiple Bits-Per-Cell
First Claim
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1. An offset-printing method for a three-dimensional printed memory with multiple bits-per-cell, comprising the steps of:
- 1) forming a substrate circuit on a semiconductor wafer, wherein said wafer comprises at least two adjacent dice including first and second dice;
2) a first printing step for transferring a first mask pattern to a first data-coding layer, wherein the origin of said data-mask is initially aligned to the origin of said first die at said first printing step;
3) a second printing step for transferring a second mask pattern to a second data-coding layer above said first data-coding layer, wherein the origin of said data-mask is initially aligned to the origin of said second die at said second printing step;
wherein said first and second mask patterns are located on a same data-mask;
said first and second data-coding layers are formed in a same memory level.
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Abstract
The present invention discloses an offset-printing method for a three-dimensional printed memory with multiple bits-per-cell. The mask-patterns for different bits-in-a-cell are merged onto a multi-region data-mask. At different printing steps, a wafer is offset by different values with respect to the data-mask. Accordingly, data-patterns from a same data-mask are printed into different bits-in-a-cell.
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20 Claims
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1. An offset-printing method for a three-dimensional printed memory with multiple bits-per-cell, comprising the steps of:
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1) forming a substrate circuit on a semiconductor wafer, wherein said wafer comprises at least two adjacent dice including first and second dice; 2) a first printing step for transferring a first mask pattern to a first data-coding layer, wherein the origin of said data-mask is initially aligned to the origin of said first die at said first printing step; 3) a second printing step for transferring a second mask pattern to a second data-coding layer above said first data-coding layer, wherein the origin of said data-mask is initially aligned to the origin of said second die at said second printing step; wherein said first and second mask patterns are located on a same data-mask;
said first and second data-coding layers are formed in a same memory level. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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