SEMICONDUCTOR DEVICE
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Abstract
A semiconductor device includes a gate electrode, a gate insulating film which includes oxidized material containing silicon and covers the gate electrode, an oxide semiconductor film provided to be in contact with the gate insulating film and overlap with at least the gate electrode, and a source electrode and a drain electrode electrically connected to the oxide semiconductor film. In the oxide semiconductor film, a first region which is provided to be in contact with the gate insulating film and have a thickness less than or equal to 5 nm has a silicon concentration lower than or equal to 1.0 at. %, and a region in the oxide semiconductor film other than the first region has lower silicon concentration than the first region. At least the first region includes a crystal portion.
3 Citations
19 Claims
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1. (canceled)
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2. A semiconductor device comprising:
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an oxide semiconductor film over a substrate; a source electrode and a drain electrode electrically connected to the oxide semiconductor film; a gate electrode; and a gate insulating film between the gate electrode and the oxide semiconductor film, wherein the oxide semiconductor film comprises a region in which a concentration of carbon is lower than or equal to 1.0×
1019 atoms/cm3, andwherein the region is located at an interface between the oxide semiconductor film and the gate insulating film and in contact with the gate insulating film. - View Dependent Claims (3, 4, 5, 6)
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7. A semiconductor device comprising:
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an oxide semiconductor film over a substrate; a source electrode and a drain electrode electrically connected to the oxide semiconductor film; a gate electrode; and a gate insulating film between the gate electrode and the oxide semiconductor film, wherein the oxide semiconductor film comprises a first region in which a concentration of carbon is lower than or equal to 1.0×
1019 atoms/cm3, andwherein the oxide semiconductor film comprises a second region in which a concentration of carbon is lower than the concentration of carbon in the first region. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A semiconductor device comprising:
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an oxide semiconductor film over a substrate; a source electrode and a drain electrode electrically connected to the oxide semiconductor film; a gate electrode; and a gate insulating film between the gate electrode and the oxide semiconductor film, wherein the oxide semiconductor film comprises a region in which a concentration of silicon is lower than or equal to 0.1 at. %, and wherein the region is located at an interface between the oxide semiconductor film and the gate insulating film and in contact with the gate insulating film. - View Dependent Claims (14, 15, 16, 17)
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18. A method for manufacturing a semiconductor device, comprising the steps of:
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forming an oxide semiconductor film over a substrate; and forming a source electrode and a drain electrode over the oxide semiconductor film, wherein the oxide semiconductor film comprises a first region in which a concentration of carbon is lower than or equal to 1.0×
1019 atoms/cm3, andwherein the oxide semiconductor film comprises a second region in which a concentration of carbon is lower than the concentration of carbon in the first region. - View Dependent Claims (19)
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Specification