NANO-STRUCTURE AND METHOD OF MAKING THE SAME
First Claim
1. A method for making a nano-structure, comprising:
- partially anodizing an aluminum layer to form a porous anodic alumina structure, the aluminum layer being positioned on an oxidizable material layer;
partially anisotropic etching the porous anodic alumina structure to form tracks within the porous anodic alumina structure;
further anodizing a remaining portion of the aluminum layer to form paths where the tracks are formed; and
anodizing the oxidizable material layer to from an oxide, whereby the oxide grows through the paths formed within the porous anodic alumina structure to form a set of super nano-pillars.
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Abstract
In an example of a method for making a nano-structure, an aluminum layer is partially anodized to form a porous anodic alumina structure. The aluminum layer is positioned on an oxidizable material layer. The porous anodic alumina structure is exposed to partial anisotropic etching to form tracks within the porous anodic alumina structure. A remaining portion of the aluminum layer is further anodized to form paths where the tracks are formed. The oxidizable material layer is anodized to from an oxide, where the oxide grows through the paths formed within the porous anodic alumina structure to form a set of super nano-pillars.
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10 Claims
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1. A method for making a nano-structure, comprising:
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partially anodizing an aluminum layer to form a porous anodic alumina structure, the aluminum layer being positioned on an oxidizable material layer; partially anisotropic etching the porous anodic alumina structure to form tracks within the porous anodic alumina structure; further anodizing a remaining portion of the aluminum layer to form paths where the tracks are formed; and anodizing the oxidizable material layer to from an oxide, whereby the oxide grows through the paths formed within the porous anodic alumina structure to form a set of super nano-pillars. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification