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First Claim
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1. A device comprising:
- a first semiconductor layer disposed on a substrate;
a dielectric layer disposed between the first semiconductor layer and a second semiconductor layer disposed on the dielectric layer, wherein the second semiconductor layer is dissimilar from the first semiconductor layer;
an optical waveguide resonator disposed in at least one of the first and second semiconductor layers, including an active region disposed in at least one of the first and second semiconductor layers, and including a capacitor formed of at least a portion of the first semiconductor layer, the dielectric layer, and the second semiconductor layer; and
an optical modulator disposed in the first and second semiconductor layers, wherein the optical modulator is to modulate an output of the waveguide.
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Abstract
An example device in accordance with an aspect of the present disclosure includes a first semiconductor layer disposed on a substrate, a dielectric layer disposed between the first semiconductor layer and a second semiconductor layer dissimilar from the first semiconductor layer. A capacitor is formed of at least a portion of the first semiconductor layer, the dielectric layer, and the second semiconductor layer, and is to be included in an optical waveguide resonator.
12 Citations
15 Claims
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1. A device comprising:
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a first semiconductor layer disposed on a substrate; a dielectric layer disposed between the first semiconductor layer and a second semiconductor layer disposed on the dielectric layer, wherein the second semiconductor layer is dissimilar from the first semiconductor layer; an optical waveguide resonator disposed in at least one of the first and second semiconductor layers, including an active region disposed in at least one of the first and second semiconductor layers, and including a capacitor formed of at least a portion of the first semiconductor layer, the dielectric layer, and the second semiconductor layer; and an optical modulator disposed in the first and second semiconductor layers, wherein the optical modulator is to modulate an output of the waveguide. - View Dependent Claims (2, 3, 4, 5)
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6. A method, comprising:
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forming a dielectric layer between a first semiconductor layer disposed on a substrate and a second semiconductor layer, wherein the second semiconductor layer is dissimilar from the first semiconductor layer; forming a capacitor in at least a portion of the first semiconductor layer, the dielectric layer, and the second semiconductor layer; forming an optical waveguide resonator in at least one of the first and second semiconductor layers, including an active region in at least one of the first and second semiconductor layers; and forming a first contact, a second contact, and a third contact of the optical waveguide resonator, wherein the first and second contacts are to generate an optical signal at the active region, and wherein the third contact is usable to modulate a bias voltage to modulate the optical signal. - View Dependent Claims (7, 8, 9)
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10. A method, comprising:
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forming a first semiconductor layer on a substrate; forming a dielectric layer between the first semiconductor layer and a second semiconductor layer, wherein the second semiconductor layer is dissimilar from the first semiconductor layer; forming an optical waveguide resonator in at least one of the first and second semiconductor layers, including an active region disposed in at least one of the first and second semiconductor layers, and including a capacitor formed of at least a portion of the first semiconductor layer, the dielectric layer, and the second semiconductor layer; and forming an optical modulator in the first and second semiconductor layers, wherein the optical modulator is to modulate an output of the waveguide, - View Dependent Claims (11, 12, 13, 14, 15)
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Specification