PHOTOLITHOGRAPHIC PATTERNING OF ORGANIC ELECTRONIC DEVICES

• US 20170222147A1
• Filed: 07/31/2015
• Published: 08/03/2017
• Est. Priority Date: 08/01/2014
• Status: Active Grant

• Current Assignee: Orthogonal, Inc.
• Original Assignee: Orthogonal, Inc.
• Inventors: DEFRANCO, John Andrew, O'TOOLE, Terrence Robert
• Granted Patent: US 10,580,987 B2
• Time in Patent Office: Days
• CPC Class Codes: G03F 7/0046 with perfluoro compounds, e.g. for dry lithography G03F7/0048 takes precedence
• CPC Class Codes: G03F 7/3021 from a wafer supported on a rotating chuck
• CPC Class Codes: G03F 7/322 Aqueous alkaline compositions
• CPC Class Codes: G03F 7/325 Non-aqueous compositions
• CPC Class Codes: G03F 7/40 Treatment after imagewise removal, e.g. baking
• CPC Class Codes: G03F 7/426 containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
• CPC Class Codes: H10K 50/11 characterised by the electroluminescent [EL] layers
• CPC Class Codes: H10K 50/15 Hole transporting layers
• CPC Class Codes: H10K 50/156 comprising a multilayered structure
• CPC Class Codes: H10K 50/16 Electron transporting layers
• CPC Class Codes: H10K 50/166 comprising a multilayered structure
• CPC Class Codes: H10K 50/18 Carrier blocking layers
• CPC Class Codes: H10K 50/805 Electrodes
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/221 by lift-off techniques
• CPC Class Codes: H10K 71/233 by photolithographic etching

Abstract

A method of patterning an organic device includes depositing a first organic functional layer over a device substrate to form a first intermediate structure, the first organic functional layer having a first function such as hole transport or electron transport. The first intermediate structure is coated with a fluoropolymer and treated in a processing agent comprising a fluorinated solvent in which the fluoropolymer is soluble to form a processed intermediate structure. A second organic functional layer is deposited over at least a portion of the first organic functional layer, the second organic functional layer also having the first function.

Claims

1. A method of patterning an organic device comprising:

a) depositing a first organic functional layer over a device substrate to form a first intermediate structure, the first organic functional layer having a first function;

b) processing the first intermediate structure to form a processed first intermediate structure, wherein the processing includes coating a fluoropolymer over the first intermediate structure and subsequent dissolution of the fluoropolymer in a processing agent comprising a fluorinated solvent; and

c) depositing a second organic functional layer over at least a portion of the first organic functional layer, the second organic functional layer also having the first function.

2. The method of claim 1 further including depositing a third organic functional layer over the second organic functional layer to form a second intermediate structure, the third organic functional layer having a second function different from the first function.

3. The method of claim 2 further including providing a conductive material over the third organic functional layer.

4. The method of claim 3 further including forming a light-emitting layer between the second and third organic functional layers.

5. The method of claim 1 wherein the organic device is an OLED device.

6. The method of claim 5 wherein the OLED device has improved luminance efficiency or lifetime relative to an OLED device not having the second organic functional layer.

7. The method of claim 1 wherein the processing includes patterning of the first or second organic functional layer.

8. The method of claim 1 wherein at least a portion of the processing is conducted in an environment having a water vapor or oxygen content that is higher than the environment used for depositing the first or second organic functional layer.

9. The method of claim 1 wherein the first function is a hole-transporting function.

10. The method of claim 1 wherein the first function is an electron-transporting or hole-blocking function.

11. The method of claim 1 wherein the first and second organic functional layers have substantially the same chemical composition.

12. The method of claim 1 wherein the organic device includes a fluoropolymer residue between the first and second organic functional layers.

13. The method of claim 1 wherein a top portion of the first organic functional layer has been modified by oxidation, contact with water vapor or contact with the fluorinated solvent.

14. An organic device comprising:

a first organic functional layer having a first function, a second organic functional layer also having the first function and provided over at least a portion of the first organic functional layer and fluorinated polymer disposed between the first and second organic functional layers, the fluorinated polymer forming a continuous or discontinuous film having a thickness of less than 2 nm.

15. The organic device of claim 14 wherein the fluorinated polymer is one or two monolayers thick.

16. The organic device of claim 14 wherein the device is an OLED device and the first function is a hole transport function, an electron transport function or a hole-blocking function.

17. The organic device of claim 14 wherein the first and second organic functional layers are small-molecule materials.