SEMICONDUCTOR DEVICE, LIQUID CRYSTAL DISPLAY DEVICE, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
First Claim
1. A semiconductor device including a substrate and a thin film transistor supported by the substrate, the thin film transistor including a gate electrode, a source electrode and a drain electrode, the semiconductor device comprising:
- a first metal layer including the gate electrode of the thin film transistor;
a first insulating layer provided on the first metal layer;
an oxide semiconductor layer provided on the first insulating layer, the oxide semiconductor layer including an active layer of the thin film transistor;
a second insulating layer provided on the oxide semiconductor layer, the second insulating layer including a portion covering a channel region of the oxide semiconductor layer;
a second metal layer provided on the oxide semiconductor layer and the second insulating layer, the second metal layer including at least the source electrode;
a third insulating layer provided on the second metal layer; and
a first transparent electrode layer provided on the third insulating layer,wherein the oxide semiconductor layer includes a first portion lying above the gate electrode and a second portion extending from the first portion so as to lie across an edge of the gate electrode on the drain electrode side,the third insulating layer does not include an organic insulating layer,the second insulating layer and the third insulating layer have a first contact hole which overlaps the second portion of the oxide semiconductor layer when viewed in a normal direction of the substrate, andthe first transparent electrode layer includes a transparent electrically-conductive layer which is in contact with the second portion of the oxide semiconductor layer in the first contact hole.
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Accused Products
Abstract
A semiconductor device includes: a first metal layer including a gate electrode; a first insulating layer provided on the first metal layer; an oxide semiconductor layer provided on the first insulating layer; a second insulating layer provided on the oxide semiconductor layer; a second metal layer provided on the oxide semiconductor layer and the second insulating layer, the second metal layer including a source electrode; a third insulating layer provided on the second metal layer; and a first transparent electrode layer provided on the third insulating layer. The oxide semiconductor layer includes a first portion lying above the gate electrode and a second portion extending from the first portion so as to lie across an edge of the gate electrode on the drain electrode side. The third insulating layer does not include an organic insulating layer. The second insulating layer and the third insulating layer have a first contact hole which overlaps the second portion of the oxide semiconductor layer when viewed in a normal direction of the substrate. The first transparent electrode layer includes a transparent electrically-conductive layer which is in contact with the second portion of the oxide semiconductor layer in the first contact hole.
11 Citations
20 Claims
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1. A semiconductor device including a substrate and a thin film transistor supported by the substrate, the thin film transistor including a gate electrode, a source electrode and a drain electrode, the semiconductor device comprising:
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a first metal layer including the gate electrode of the thin film transistor; a first insulating layer provided on the first metal layer; an oxide semiconductor layer provided on the first insulating layer, the oxide semiconductor layer including an active layer of the thin film transistor; a second insulating layer provided on the oxide semiconductor layer, the second insulating layer including a portion covering a channel region of the oxide semiconductor layer; a second metal layer provided on the oxide semiconductor layer and the second insulating layer, the second metal layer including at least the source electrode; a third insulating layer provided on the second metal layer; and a first transparent electrode layer provided on the third insulating layer, wherein the oxide semiconductor layer includes a first portion lying above the gate electrode and a second portion extending from the first portion so as to lie across an edge of the gate electrode on the drain electrode side, the third insulating layer does not include an organic insulating layer, the second insulating layer and the third insulating layer have a first contact hole which overlaps the second portion of the oxide semiconductor layer when viewed in a normal direction of the substrate, and the first transparent electrode layer includes a transparent electrically-conductive layer which is in contact with the second portion of the oxide semiconductor layer in the first contact hole. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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2. A semiconductor device including a substrate and a thin film transistor supported by the substrate, the thin film transistor including a gate electrode, a source electrode and a drain electrode, the semiconductor device comprising:
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an oxide semiconductor layer including an active layer of the thin film transistor; a first insulating layer provided on the oxide semiconductor layer; a first metal layer provided on the first insulating layer, the first metal layer including the gate electrode of the thin film transistor; a second insulating layer provided on the first metal layer; a second metal layer provided on the second insulating layer, the second metal layer including at least the source electrode; a third insulating layer provided on the second metal layer; and a first transparent electrode layer provided on the third insulating layer, wherein the oxide semiconductor layer includes a first portion lying above the gate electrode and a second portion extending from the first portion so as to lie across an edge of the gate electrode on the drain electrode side, the third insulating layer does not include an organic insulating layer, the first insulating layer, the second insulating layer and the third insulating layer have a first contact hole which overlaps the second portion of the oxide semiconductor layer when viewed in a normal direction of the substrate, and the first transparent electrode layer includes a transparent electrically-conductive layer which is in contact with the second portion of the oxide semiconductor layer in the first contact hole.
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15. A manufacturing method of a semiconductor device, the semiconductor device including a substrate and a thin film transistor supported by the substrate, the thin film transistor including a gate electrode, a source electrode and a drain electrode, the method comprising the steps of:
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(a) forming a first metal layer on the substrate, the first metal layer including the gate electrode of the thin film transistor; (b) forming a first insulating layer on the first metal layer; (c) forming an oxide semiconductor layer on the first insulating layer; (d) forming a second insulating layer on the oxide semiconductor layer, the second insulating layer including a portion covering a channel region of the oxide semiconductor layer; (e) forming a second metal layer on the oxide semiconductor layer and the second insulating layer, the second metal layer including at least the source electrode; (f) forming a third insulating layer on the second metal layer; (g) forming a contact hole in the second insulating layer and the third insulating layer; and (h) after step (g), forming a transparent electrode layer on the third insulating layer, wherein the oxide semiconductor layer formed in step (c) includes a first portion lying above the gate electrode and a second portion extending from the first portion so as to lie across an edge of the gate electrode on the drain electrode side, the third insulating layer formed in step (f) does not include an organic insulating layer, the contact hole formed in step (g) overlaps the second portion of the oxide semiconductor layer when viewed in a normal direction of the substrate, and the transparent electrode layer formed in step (h) includes a transparent electrically-conductive layer which is in contact with the second portion of the oxide semiconductor layer in the contact hole. - View Dependent Claims (17, 18, 19, 20)
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16. A manufacturing method of a semiconductor device, the semiconductor device including a substrate and a thin film transistor supported by the substrate, the thin film transistor including a gate electrode, a source electrode and a drain electrode, the method comprising the steps of:
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(a) forming an oxide semiconductor layer on the substrate, the oxide semiconductor layer including an active layer of the thin film transistor; (b) forming a first insulating layer on the oxide semiconductor layer; (c) forming a first metal layer on the first insulating layer, the first metal layer including the gate electrode of the thin film transistor; (d) forming a second insulating layer on the first metal layer; (e) forming a second metal layer on the second insulating layer, the second metal layer including at least the source electrode; (f) forming a third insulating layer on the second metal layer; (g) forming a contact hole in the first insulating layer, the second insulating layer and the third insulating layer; and (h) after step (g), forming a transparent electrode layer on the third insulating layer, wherein the oxide semiconductor layer formed in step (a) includes a first portion lying above the gate electrode and a second portion extending from the first portion so as to lie across an edge of the gate electrode on the drain electrode side, the third insulating layer formed in step (f) does not include an organic insulating layer, the contact hole formed in step (g) overlaps the second portion of the oxide semiconductor layer when viewed in a normal direction of the substrate, and the transparent electrode layer formed in step (h) includes a transparent electrically-conductive layer which is in contact with the second portion of the oxide semiconductor layer in the contact hole.
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Specification