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Non-Invasive Thickness Measurement Using Capacitance Measurement

  • US 20170307349A1
  • Filed: 04/20/2016
  • Published: 10/26/2017
  • Est. Priority Date: 04/20/2016
  • Status: Active Grant
First Claim
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1. A method of determining a thickness of a material, the method comprising:

  • applying a time-varying signal to a first electrically conductive pad;

    wherein the first pad is disposed in spaced relation to a second electrically conductive pad and electrically isolated therefrom;

    wherein the second pad is grounded;

    wherein the first and second pads are permanently affixed to the material;

    wherein the first pad, the second pad, and the material jointly form a capacitor;

    determining a capacitance of the capacitor based on an electrical response of the capacitor to the application of the time-varying signal to the first pad;

    determining the thickness of the material based on the determined capacitance.

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