Overhead Manufacturing, Processing and Storage System

• US 20180144964A1
• Filed: 10/24/2017
• Published: 05/24/2018
• Est. Priority Date: 10/24/2016
• Status: Active Grant

• Current Assignee: Murata Machinery Limited (Muratec)
• Original Assignee: Tec-Sem AG
• Inventors: Dovids, Gerhard, Fenner, Yves, Fiddes, John, Wohanka, Christian, Rahrbach, Bernd
• Granted Patent: US 10,497,596 B2
• Time in Patent Office: Days
• CPC Class Codes: B65G 47/61 for articles
• CPC Class Codes: H01L 21/67706 Mechanical details, e.g. roller, belt H01L21/67709 takes precedence
• CPC Class Codes: H01L 21/6773 Conveying cassettes, containers or carriers
• CPC Class Codes: H01L 21/67733 Overhead conveying
• CPC Class Codes: H01L 21/67736 Loading to or unloading from a conveyor
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/67781 Batch transfer of wafers

Abstract

This disclosure relates generally to substrate and manufacturing system, processes and methods. In one example embodiment, to methods, apparatus, and systems which provides improved substrate processing and manufacturing wherein at least a portion of the system, apparatus or method may be in an overhead system, such as attached to a ceiling or overhead mounts, such that floor space and other efficiencies may be founded.

Claims

1. A substrate processing system comprising at least the following subsystems:

a storage system for storing a plurality of substrates;

a processing system for performing at least one action on the plurality of substrates;

a loading system for loading and unloading the plurality of substrates to and from the storage and processing system; and

a transportation system for transporting the substrates between the storage, processing, and loading system,

wherein at least one sub-system is ceiling mounted.

2. The system of claim 1, wherein the ceiling mounted system reduces foot print of the substrate processing system.

3. The system of claim 1, wherein the system comprises at least one of a high density and low density containers, wherein the high density containers hold substrates at a higher density than the low density containers

4. The system of claim 3, wherein the high density containers comprise Tec-cell containers.

5. The system of claim 3, wherein the low density containers comprise Front Opening Unified Pod (FOUP) containers.

6. The system of claim 1, wherein the storage comprises at least one of an opener station, an ID reading station, transfer station, and high density storage

7. The system of claim 1, wherein all of the system and sub-systems s are ceiling mounted with zero foot print on ground level.

8. The system of claim 1 further comprises an operator station on floor for access to the ceiling mounted system.

9. The system of claim 1, wherein the system includes a controller unit.

10. The system of claim 9, wherein the controller unit is a user operable drop down controller.

11. The system of claim 10, wherein the drop down controller is configured to move vertically and horizontally in reference from ceiling.

12. The system of claim 10, wherein the drop down controller is configured to be manually pulled down by a user.

13. The system of claim 1, wherein the transportation system is an overhead transportation track (OHT).

14. The system of claim 1, wherein the ceiling mounted system is integrated with conventional non-ceiling systems.

15. The system of claim 1, wherein space underneath the ceiling mounted system is free for logistical operations.

16. The system of claim 1 further comprises a drop ceiling arrangement for accessing the ceiling mounted system from floor.

17. The system of claim 1 further comprises a raise floor arrangement for accessing the ceiling mounted system from raised floor.

18. A substrate processing system comprising at least the following subsystems:

at least one containers, wherein there is one or more of a high density and low density containers, wherein the high density containers hold substrates at a higher density than the low density containers

a storage system for storing a plurality of substrates;

a processing system for performing at least one action on the plurality of substrates;

a loading system for loading and unloading the plurality of substrates to and from the storage and processing system; and

a transportation system for transporting the substrates between the storage, processing, and loading system,

wherein at least one sub-system is ceiling mounted, wherein the ceiling mounted system reduces foot print of the substrate processing system.

19. The system of claim 18, wherein the storage comprises at least one of an opener station, an ID reading station, transfer station, and high density storage

20. The system of claim 18, wherein the system includes a controller unit, wherein the controller unit is a user operable drop down controller.