X-Ray Source for 2D Scanning Beam Imaging

• US 20180286624A1
• Filed: 09/29/2017
• Published: 10/04/2018
• Est. Priority Date: 09/30/2016
• Status: Active Grant

• Current Assignee: American Science and Engineering Incorporated (OSI Systems Incorporated)
• Original Assignee: American Science and Engineering Incorporated (OSI Systems Incorporated)
• Inventors: Rommel, Martin, Schubert, Jeffrey R.
• Granted Patent: US 10,720,300 B2
• Time in Patent Office: Days
• CPC Class Codes: G21K 1/043 changing time structure of beams by mechanical means, e.g. choppers, spinning filter wheels
• CPC Class Codes: H01J 35/147 Spot size control
• CPC Class Codes: H01J 35/153 Spot position control
• CPC Class Codes: H01J 35/30 by deflection of the cathode ray

Abstract

A two-dimensional X-ray scanner that includes a beam steerer for steering an electron beam to impinge upon a target; and a collimator further including an aperture adapted for travel in an aperture travel path for rotating the X-ray beam plane spanned by the electron beam impinging upon the target along a focal track for emitting a scanning X-ray beam.

Claims

1. A two-dimensional X-ray scanner comprising:

a beam focuser and a beam steerer for scanning an electron beam on a path along an X-ray production target as a function of time; and

an aperture adapted for travel in an aperture travel path relative to X-rays emitted by the X-ray production target.

2. A two-dimensional X-ray scanner in accordance with claim 1, wherein the aperture is an intersection of a fixed slit and a moving slit.

3. A two-dimensional X-ray scanner in accordance with claim 1, wherein the X-ray production target is a planar target block.

4. A two-dimensional X-ray scanner in accordance with claim 1, wherein the X-ray production target is convex.

5. A two-dimensional X-ray scanner in accordance with claim 1, wherein the two-dimensional X ray scanner is configured to have a predefined take-off angle and wherein, during operation, the electron beam is steered to maintain the pre-defined take-off angle with the travelling aperture.

6. A method for sweeping an X-ray beam across an object of inspection in two dimensions using a two-dimensional X-ray scanner, the method comprising:

varying a direction of a beam of electrons relative to a target upon which the beam of electrons impinges; and

coupling X-rays generated at the target via an aperture that moves along a prescribed path as a function of time.

7. The method in accordance with claim 6, wherein coupling X-rays generated at the target may include coupling the X-rays via an intersection of a fixed slit and a moving slit.

8. The method in accordance with claim 6, wherein the target is a planar target block.

9. The method in accordance with claim 6, wherein the target is convex.

10. The method in accordance with claim 6, wherein the two-dimensional X ray scanner is configured to have a predefined take-off angle and wherein, during operation, the electron beam is steered to maintain the pre-defined take-off angle with the travelling aperture.

11. A two-dimensional X-ray scanner comprising:

a beam steerer for steering an electron beam to impinge upon a target; and

a collimator comprising an aperture adapted for travel in an aperture travel path for rotating the electron beam impinging upon the target for emitting an X-ray beam.

12. A two-dimensional X-ray scanner in accordance with claim 11, wherein the target is a planar target block.

13. A two-dimensional X-ray scanner in accordance with claim 11, wherein the target is convex.

14. A two-dimensional X-ray scanner in accordance with claim 11, wherein the two-dimensional X ray scanner is configured to have a predefined take-off angle and wherein, during operation, the electron beam is steered to maintain the pre-defined take-off angle with the travelling aperture.