ELECTRONIC CIRCUIT FOR COMPENSATING A SENSITIVITY DRIFT OF A HALL EFFECT ELEMENT DUE TO STRESS
First Claim
1. An electronic circuit comprising:
- a semiconductor substrate,a resistor bridge disposed upon the semiconductor substrate, the resistor bridge comprising;
a first set of resistive elements having a first vertical epitaxial resistor and a first lateral epitaxial resistor coupled in series; and
a second set of resistive elements having a second vertical epitaxial resistor and a second lateral epitaxial resistor coupled in series,wherein the first set of resistive elements and the second set of resistive elements are coupled in parallel, and wherein the resistor bridge is operable to generate a differential signal responsive to a stress of the semiconductor substrate; and
an epitaxial layer disposed over the surface of the semiconductor substrate, the epitaxial layer having a first surface distal from the semiconductor substrate and a second surface proximate to the semiconductor substrate.
6 Assignments
0 Petitions
Accused Products
Abstract
The present disclosure is directed to an electronic circuit having a Hall effect element and a resistor bridge, all disposed over a common semiconductor substrate. The resistor bridge includes a first set of resistive elements having a first vertical epitaxial resistor and a first lateral epitaxial resistor coupled in series, and a second set of resistive elements having a second vertical epitaxial resistor and a second lateral epitaxial resistor coupled in series. The first set of resistive elements and the second set of resistive elements can be coupled in parallel. The resistor bridge can be configured to sense a stress value of the Hall effect element.
0 Citations
23 Claims
-
1. An electronic circuit comprising:
-
a semiconductor substrate, a resistor bridge disposed upon the semiconductor substrate, the resistor bridge comprising; a first set of resistive elements having a first vertical epitaxial resistor and a first lateral epitaxial resistor coupled in series; and a second set of resistive elements having a second vertical epitaxial resistor and a second lateral epitaxial resistor coupled in series, wherein the first set of resistive elements and the second set of resistive elements are coupled in parallel, and wherein the resistor bridge is operable to generate a differential signal responsive to a stress of the semiconductor substrate; and an epitaxial layer disposed over the surface of the semiconductor substrate, the epitaxial layer having a first surface distal from the semiconductor substrate and a second surface proximate to the semiconductor substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
-
13. An electronic circuit comprising:
-
a semiconductor substrate; a Hall effect element disposed upon the semiconductor substrate; a resistor bridge disposed upon the semiconductor substrate and proximate to the Hall effect element, the resistor bridge comprising; a first set of resistive elements having a first vertical epitaxial resistor and a first lateral epitaxial resistor coupled in series; and a second set of resistive elements having a second vertical epitaxial resistor and a second lateral epitaxial resistor coupled in series, wherein the first set of resistive elements and the second set of resistive elements are coupled in parallel, and wherein the resistor bridge is operable to sense a stress value of the semiconductor substrate and the Hall effect element, and wherein the resistor bridge is operable to generate a differential signal responsive to the stress value of the semiconductor substrate and the Hall effect element; and an epitaxial layer disposed over the surface of the semiconductor substrate, the epitaxial layer having a first surface distal from the semiconductor substrate and a second surface proximate to the semiconductor substrate. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
-
Specification