RADIATION SHIELD

• US 20190051544A1
• Filed: 08/08/2017
• Published: 02/14/2019
• Est. Priority Date: 08/08/2017
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holding B.V. (ASM International NV)
• Inventors: Verbaas, Melvin
• Granted Patent: US 10,692,741 B2
• Time in Patent Office: Days
• CPC Class Codes: C23C 16/4586 Elements in the interior of the support, e.g. electrodes, heating or cooling devices
• CPC Class Codes: C23C 16/481 by radiant heating of the substrate
• CPC Class Codes: C23C 16/488 Protection of windows for introduction of radiation into the coating chamber
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/67103 mainly by conduction
• CPC Class Codes: H01L 21/67115 mainly by radiation
• CPC Class Codes: H01L 21/67161 characterized by the layout of the process chambers
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67248 Temperature monitoring
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support

Abstract

A radiation shield and an assembly and a reactor including the radiation shield are disclosed. The radiation shield can be used to control heat flux from a susceptor heater assembly and thereby enable better control of temperatures across a surface of a substrate placed on a surface of the susceptor heater assembly.

Claims

1. A radiation shield for use in a reactor, the radiation shield comprising:

a plate comprising a first section and a second section, wherein the first section comprises an annular disc having an inner perimeter and an outer perimeter, and wherein the second section comprising a hollow frusto shape; and

an attachment device for attaching the plate to a susceptor heater assembly within a reaction chamber of the reactor.

2. The radiation shield of claim 1, wherein the inner perimeter comprise a diameter that ranges from about 80 mm to about 90 mm.

3. The radiation shield of claim 1, wherein the inner perimeter does not contact the susceptor heater assembly.

4. The radiation shield of claim 1, wherein the attachment device comprises a slidable member.

5. The radiation shield of claim 4, wherein the slidable member comprises a recess to receive a threaded fastener.

6. The radiation shield of claim 4, wherein the slidable member comprises a recess to receive an alignment pin.

7. The radiation shield of claim 4, wherein the slidable member comprises a first end coupled to the plate and a second end configured to couple to the susceptor heater assembly.

8. The radiation shield of claim 1, further comprising one or more threaded fasteners to attach the slidable member to the plate.

9. The radiation shield of claim 8, wherein the attachment device comprises rivets to receive at least one of the one or more threaded fasteners.

10. The radiation shield of claim 8, wherein the attachment device comprises a block to receive at least one of the one or more threaded fasteners.

11. The radiation shield of claim 10, wherein the block comprises an alignment pin.

12. The radiation shield of claim 1, further comprising an alignment pin to align the attachment device relative to the susceptor heater assembly.

13. An apparatus for supporting a substrate during a reaction process, the apparatus comprising:

a susceptor heater assembly comprising a base comprising an outer surface; and

a radiation shield attached to the outer surface, wherein the radiation shield comprises;

a plate comprising a first section and a second section, wherein the first section comprises an annular disc having an inner perimeter and an outer perimeter, and wherein the second section comprising a hollow frusto shape; and

an attachment device for attaching the plate to the susceptor heater assembly within the reactor.

14. The apparatus of claim 13, further comprising one or more lift pins, wherein the one or more lift pins are received within a space of the plate defined by the inner perimeter and are received within the susceptor heater assembly.

15. The apparatus of claim 13, further comprising a cap on a top surface of the base.

16. The apparatus of claim 13, further comprising a stem, wherein the radiation shield does not contact the stem.

17. The apparatus of claim 13, wherein the outer surface comprises a ledge, and wherein the radiation shield is engaged with and rests on the ledge.

18. The radiation shield of claim 13, wherein the attachment device comprises a slidable member.

19. The radiation shield of claim 18, wherein the slidable member comprises a first end coupled to the plate and a second end configured to couple to the outer surface.

20. A method of using a radiation shield within a reaction chamber of a reactor, the method comprising the steps of:

providing a susceptor heater assembly having an outer surface comprising a ledge;

attaching a radiation shield to the ledge;

using a tool to measure the a distance between an outer perimeter of the radiation shield and an interior surface of a reaction chamber; and

adjusting placement of the radiation shield based on the measurement.

21. An apparatus for supporting a substrate during a reaction process, the apparatus comprising:

a susceptor heater assembly comprising a base comprising an outer surface;

a flow control ring about a perimeter of the susceptor heater assembly; and

a radiation shield attached to the flow control ring.