CHAMBER WITH FLOW-THROUGH SOURCE
First Claim
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1. An inductively coupled plasma source comprising:
- a plate comprising a dielectric material and at least partially defining a channel; and
a conductive material seated within the channel, wherein the conductive material is characterized by a spiral or coil configuration, and wherein the conductive material is coupled with an RF source.
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Abstract
Described processing chambers may include a chamber housing at least partially defining an interior region of a semiconductor processing chamber. The chamber may include a showerhead positioned within the chamber housing, and the showerhead may at least partially divide the interior region into a remote region and a processing region in which a substrate can be contained. The chamber may also include an inductively coupled plasma source positioned between the showerhead and the processing region. The inductively coupled plasma source may include a conductive material within a dielectric material.
47 Citations
20 Claims
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1. An inductively coupled plasma source comprising:
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a plate comprising a dielectric material and at least partially defining a channel; and a conductive material seated within the channel, wherein the conductive material is characterized by a spiral or coil configuration, and wherein the conductive material is coupled with an RF source. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An inductively coupled plasma source comprising:
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a first plate comprising a dielectric material and at least partially defining a channel; and a conductive material seated within the channel, wherein the conductive material extends continuously through the dielectric material from a first position along a radial edge of the first plate where the conductive material enters the first plate to a second position along the radial edge of the first plate where the conductive material exits the first plate, and wherein the conductive material is coupled with an RF source. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. An inductively coupled plasma source comprising:
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a plate defining at least a portion of a channel within the plate, wherein the plate comprises a dielectric material; and a conductive material seated within the at least a portion of the channel, wherein the conductive material is characterized by a spiral or coil configuration, wherein the conductive material extends continuously through the dielectric material from a first position along a radial edge of the plate where the conductive material enters the plate to a second position along the radial edge of the plate where the conductive material exits the plate, wherein the conductive material is characterized by a coil pattern extending vertically about a central axis of the plate for at least two turns, and wherein the conductive material is coupled with an RF source. - View Dependent Claims (20)
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Specification