LOAD LOCK SYSTEM FOR CHARGED PARTICLE BEAM IMAGING

• US 20190214225A1
• Filed: 01/07/2019
• Published: 07/11/2019
• Est. Priority Date: 02/23/2017
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: Hermes Microvision, Inc. (ASML Holding NV)
• Inventors: HUANG, Hsuan-Bin, LU, Chun-Liang, TU, Chin-Fa, LIN, Wen-Sheng, WANG, Youjin
• Granted Patent: US 10,643,818 B2
• Time in Patent Office: Days
• CPC Class Codes: G01B 11/00 Measuring arrangements characterised by the use of optical techniques
• CPC Class Codes: H01J 2237/022 Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
• CPC Class Codes: H01J 2237/20292 Means for position and/or orientation registration
• CPC Class Codes: H01J 2237/28 Scanning microscopes
• CPC Class Codes: H01J 37/18 Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel vacuum locks for electron-beam tubes in general H01J29/865
• CPC Class Codes: H01J 37/185 Means for transferring objects between different enclosures of different pressure or atmosphere
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support introducing the objects H01J37/18
• CPC Class Codes: H01J 37/261 Details
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/67265 of substrates stored in a container, a magazine, a carrier, a boat or the like
• CPC Class Codes: H01L 21/67766 Mechanical parts of transfer devices robots in general in B25J

Abstract

A load lock system for charged particle beam imaging with a particle shielding plate, a bottom seal plate and a plurality of sensor units is provided. The sensor units are located above the wafer, the shield plate is designed to have a few number of screws, and the bottom seal plate contains no cable, no contact sensors and fewer screws used. In the invention, the system is designed to improve the contamination particles from components in the load lock system of charged particle beam inspection tool and also to simplify its assembly.

Claims

1-26. -26. (canceled)

27. An apparatus comprising:

a holder configured to hold a sample;

a particle shielding plate disposed above the holder; and

a position detecting unit including an emitter configured to project a light beam toward the holder,

wherein the particle shielding plate includes an opening corresponding to the position detecting unit.

31. The apparatus of claim 27, wherein the position detecting unit is one of a plurality of position detecting units that are separated from the bottom seal plate and are configured to identify a position of the sample, the position including at least a vertical position of the sample.

32. The apparatus of claim 31, further comprising a view port located between the plurality of position detecting units and the sample to pass the light beam and a reflected signal from the sample.

33. The apparatus of claim 31, wherein the position detecting unit includes a laser sensor.

40. The apparatus of claim 27, wherein the apparatus is configured to be coupled to a load lock system to enable transfer of the sample between the apparatus and a low vacuum environment, wherein the load lock system is configured for use in an inspection tool.

41. The apparatus of claim 27, wherein the load lock apparatus is configured to be installed in a SORIL SEM.

42. A method for shielding components in a charged particle beam inspection tool from contamination particles, comprising:

irradiating, by a position detecting unit, a sample provided on a holder through an opening in a particle shielding plate that is disposed above the holder.

43. The method of claim 42, wherein the position detecting unit includes an emitter configured to project a light beam toward the sample,

wherein the particle shielding plate includes an opening corresponding to the emitter.

43-1. The method of claim 42, further comprising:

providing the sample in a room, the room formed at least partially by a bottom plate disposed below the holder and a top seal plate disposed above the holder.

44. The method of claim 42, further comprising:

receiving a reflected signal from the sample.

45. The method of claim 42, further comprising:

identifying a position of the sample, the position including at least a vertical position of the sample.

46. The method of claim 42, further comprising:

passing a light beam and a reflected signal from the sample through a view port located between the position detecting unit and the sample.