MESH FILTER PRODUCTION METHOD AND MESH FILTER
First Claim
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1. A method of producing a mesh filter, the method comprising steps of:
- preparing a cylindrical platable metal base material;
forming a mesh filter-shaped resist pattern by applying a photoresist onto a surface of the cylindrical metal base material, exposing the photoresist on the surface of the cylindrical metal base material and developing the photoresist on the surface of cylindrical metal base material;
forming a diamond-like carbon coating film on surfaces of the cylindrical metal base material and the mesh filter-shaped resist pattern;
forming a diamond-like carbon pattern on the surface of the cylindrical metal base material by peeling off the diamond-like carbon coating film formed on the mesh filter-shaped resist pattern together with the mesh filter-shaped resist pattern to produce a roll with the diamond-like carbon pattern; and
producing a mesh filter by continuous plating of a platable metal using the roll with the diamond-like carbon pattern, wherein the mesh filter-shaped resist pattern is obtained by forming multiple mesh filter-shaped resist patterns of different openings on a same cylindrical metal base material.
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Abstract
Provided are a method of producing a mesh filter, which is capable of forming more minute holes than by punching processing, and which makes it possible, by forming meshes of different openings on the same base material, to appropriately change a flow rate or a light amount with the various opening sizes, and a mesh filter.
The method of producing a mesh filter includes a step of producing a mesh filter by continuously plating a platable metal using a roll with a DLC pattern, wherein a mesh filter-shaped resist pattern is obtained by forming multiple mesh filter-shaped resist patterns of different openings on the same cylindrical metal base material.
2 Citations
20 Claims
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1. A method of producing a mesh filter, the method comprising steps of:
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preparing a cylindrical platable metal base material; forming a mesh filter-shaped resist pattern by applying a photoresist onto a surface of the cylindrical metal base material, exposing the photoresist on the surface of the cylindrical metal base material and developing the photoresist on the surface of cylindrical metal base material; forming a diamond-like carbon coating film on surfaces of the cylindrical metal base material and the mesh filter-shaped resist pattern; forming a diamond-like carbon pattern on the surface of the cylindrical metal base material by peeling off the diamond-like carbon coating film formed on the mesh filter-shaped resist pattern together with the mesh filter-shaped resist pattern to produce a roll with the diamond-like carbon pattern; and producing a mesh filter by continuous plating of a platable metal using the roll with the diamond-like carbon pattern, wherein the mesh filter-shaped resist pattern is obtained by forming multiple mesh filter-shaped resist patterns of different openings on a same cylindrical metal base material. - View Dependent Claims (2, 3, 4, 17, 18, 19)
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5. A mesh filter, comprising:
a plurality of mesh filter zones of different openings produced by continuously plating a platable metal using a roll with a diamond-like carbon pattern, wherein the roll with the diamond-like carbon pattern is produced by; forming a mesh filter-shaped resist pattern by applying a photoresist onto a surface of a cylindrical platable metal base material, exposing the photoresist on the surface of the cylindrical platable metal base material and developing the photoresist on the surface of the cylindrical platable metal base material; forming a diamond-like carbon coating film on surfaces of the cylindrical metal base material and the mesh filter-shaped resist pattern; and forming a diamond-like carbon pattern on the surface of the cylindrical metal base material by peeling off the diamond-like carbon coating film formed on the mesh filter-shaped resist pattern together with the mesh filter-shaped resist pattern, wherein the mesh filter-shaped resist pattern is obtained by forming multiple mesh filter-shaped resist patterns of different openings on a same cylindrical metal base material. - View Dependent Claims (6, 7, 8, 20)
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9. A fluid flow rate control mechanism, comprising:
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a mesh filter comprising a plurality of mesh filter zones of different openings produced by continuously plating a platable metal using a roll with a diamond-like carbon pattern, wherein the roll with the diamond-like carbon pattern is produced by; forming a mesh filter-shaped resist pattern by applying a photoresist onto a surface of a cylindrical platable metal base material, exposing the photoresist on the surface of the cylindrical platable metal base material and developing the photoresist on the surface of the cylindrical platable metal base material; forming a diamond-like carbon coating film on surfaces of the cylindrical metal base material and the mesh filter-shaped resist pattern; and forming a diamond-like carbon pattern on the surface of the cylindrical metal base material by peeling off the diamond-like carbon coating film formed on the mesh filter-shaped resist pattern together with the mesh filter-shaped resist pattern, wherein the mesh filter-shaped resist pattern is obtained by forming multiple mesh filter-shaped resist patterns of different openings on a same cylindrical metal base material; and a slide mechanism configured to slide the mesh filter, wherein a flow rate of a fluid through a mesh filter zone of an arbitrary opening is controlled by sliding the mesh filter. - View Dependent Claims (14, 15, 16)
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10. A light amount control mechanism, comprising:
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a mesh filter comprising a plurality of mesh filter zones of different openings produced by continuously plating a platable metal using a roll with a diamond-like carbon pattern, wherein the roll with the diamond-like carbon pattern is produced by; forming a mesh filter-shaped resist pattern by applying a photoresist onto a surface of a cylindrical platable metal base material, exposing the photoresist on the surface of the cylindrical platable metal base material and developing the photoresist on the surface of the cylindrical platable metal base material; forming a diamond-like carbon coating film on surfaces of the cylindrical metal base material and the mesh filter-shaped resist pattern; and forming a diamond-like carbon pattern on the surface of the cylindrical metal base material by peeling off the diamond-like carbon coating film formed on the mesh filter-shaped resist pattern together with the mesh filter-shaped resist pattern, wherein the mesh filter-shaped resist pattern is obtained by forming multiple mesh filter-shaped resist patterns of different openings on a same cylindrical metal base material; and a slide mechanism configured to slide the mesh filter, wherein a light amount through a mesh filter zone of an arbitrary opening is controlled by sliding the mesh filter. - View Dependent Claims (11, 12, 13)
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Specification