HIGH VOLTAGE SWITCH WITH ISOLATED POWER

• US 20200051786A1
• Filed: 11/01/2018
• Published: 02/13/2020
• Est. Priority Date: 08/10/2018
• Status: Active Grant

• Current Assignee: EHT Ventures LLC
• Original Assignee: Eagle Harbor Technolologies, Inc.
• Inventors: Ziemba, Timothy M., Miller, Kenneth E., Prager, James R., Carscadden, John G., Slobodov, Ilia
• Granted Patent: US 10,607,814 B2
• Time in Patent Office: Days
• CPC Class Codes: H01F 27/24 Magnetic cores
• CPC Class Codes: H01F 27/28 Coils; Windings; Conductive connections
• CPC Class Codes: H01F 30/04 having two or more secondary windings, each supplying a separate load, e.g. for radio set power supplies
• CPC Class Codes: H01F 30/10 Single-phase transformers H01F30/16 takes precedence
• CPC Class Codes: H01F 38/14 Inductive couplings for wireless supply or distribution of electric power using inductive coupling H02J50/10
• CPC Class Codes: H01J 2237/334 Etching
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge
• CPC Class Codes: H01L 21/687 using mechanical means, e.g. chucks, clamps or pinches using elecrostatic chucks H01L21/6831
• CPC Class Codes: H02M 1/092 the control signals being transmitted optically
• CPC Class Codes: H02M 3/335 using semiconductor devices only
• CPC Class Codes: H02M 7/06 using discharge tubes without control electrode or semiconductor devices without control electrode
• CPC Class Codes: H03K 17/08142 in field-effect transistor switches
• CPC Class Codes: H03K 17/08146 in bipolar transistor switches
• CPC Class Codes: H03K 17/08148 in composite switches
• CPC Class Codes: H03K 17/107 in composite switches
• CPC Class Codes: H03K 17/61 using transformer coupling
• CPC Class Codes: H03K 17/691 using transformer coupling
• CPC Class Codes: H03K 17/78 using opto-electronic devices, i.e. light-emitting and photoelectric devices electrically- or optically-coupled
• CPC Class Codes: H03K 17/7955 using phototransistors
• CPC Class Codes: H03K 3/57 : the switching device being a semiconductor device

Abstract

A high voltage switch comprising: a high voltage power supply providing power greater than about 5 kV; a control voltage power source; a plurality of switch modules arranged in series with respect to each other each of the plurality of switch modules configured to switch power from the high voltage power supply, and an output configured to output a pulsed output signal having a voltage greater than the rating of any switch of the plurality of switch modules, a pulse width less than 2 μs, and at a pulse frequency greater than 10 kHz.

Claims

1. A high voltage switch comprising:

a high voltage power supply having a voltage greater than 5 kV;

a first switch module comprising;

a first switch having a first voltage rating;

a first transformer electrically or inductively coupled with a control voltage power source and electrically or inductively coupled with the first switch, providing a voltage less than the first voltage rating; and

a first switch trigger electrically or inductively coupled with the first switch;

a second switch module arranged in series with the first switch module, the second switch module comprising;

a second switch having a second voltage rating;

a second transformer electrically or inductively coupled with the control voltage power electrically or inductively and electrically coupled with the second switch, providing a voltage less than the second voltage rating; and

a second switch trigger electrically or inductively coupled with the second switch, wherein the second switch trigger is independently triggered relative to the first switch trigger, and

a plasma electrically or inductively coupled with the first switch module and/or the second switch module, the plasma having a capacitance less than about 20 nF, and the plasma receiving pulses from the high voltage power supply greater than either the first switch voltage rating and/or the second switch voltage rating.

2. The high voltage switch according to claim 1, wherein the first switch trigger produces a trigger having a rise time less than about 20 ns.

3. The high voltage switch according to claim 1, wherein the switched pulses have a frequency greater than about 40 kHz.

4. The high voltage switch according to claim 1, wherein the switched pulses have a rise time less than about 75 ns.

5. The high voltage switch according to claim 1, wherein the switched pulses have a fall time less than 100 ns.

6. The high voltage switch according to claim 1, wherein the period of time where the first switch is closed while the second switch is open is less than 1 ms.

7. The high voltage switch according to claim 1, wherein the stray capacitance of the high voltage switch is less than about 100 pF.

8. The high voltage switch according to claim 1, wherein the stray inductance of either or both the first switch module or the second switch module less than 300 nH.

9. The high voltage switch according to claim 1, wherein the control voltage power source provides AC line voltages and frequencies.

10. The high voltage switch according to claim 1, wherein the control voltage power source provides 120 VAC at 60 Hz.

11. The high voltage switch according to claim 1, further comprising a first plurality of secondary windings and a first plurality of primary windings having a stray capacitance between the first plurality of secondary windings and the first plurality of primary windings is less than 100 pF.

12. The high voltage switch according to claim 1, further comprising:

a transformer core; and

a plurality of primary windings wound around the transformer core, the plurality of primary windings being coupled with the control voltage power source,

wherein the first transformer comprises the transformer, the plurality of primary windings, and a first plurality of secondary windings wound around the transformer; and

wherein the second transformer comprises the transformer, the plurality of primary windings, and a second plurality of secondary windings wound around the transformer.

13. A high voltage switch comprising:

a high voltage power supply providing power greater than about 5 kV;

a control voltage power source;

a plurality of switch modules arranged in series with respect to each other, each of the plurality of switch modules configured to switch power from the high voltage power supply, each of the plurality of switch modules comprising;

a switch having a collector, an emitter, and a gate, and a voltage rating;

a transformer electrically or inductively coupled with the control voltage power source and electrically or inductively coupled with the switch; and

a gate trigger electrically or inductively coupled with the gate of the switch, wherein the switch is opened and closed based on a signal from the gate trigger; and

an output configured to output a pulsed output signal having a voltage greater than the rating of any switch of the plurality of switch modules, a pulse width less than 2 μ

s, and at a pulse frequency greater than 10 kHz;

wherein each gate trigger of each of the plurality of switch modules are independently triggered.

14. The high voltage switch according to claim 13, further comprising a plasma electrically or inductively coupled with the output and having a capacitance less than about 20 nF.

15. The high voltage switch according to claim 13, wherein the pulsed output signal includes pulses having a rate of rise greater than 10¹¹ V/s.

16. The high voltage switch according to claim 13, wherein one or more switch modules of the plurality of switch modules produce less than 50 ns of jitter.

17. The high voltage switch according to claim 13, wherein the output is electrically or inductively coupled with a plasma load.

18. The high voltage switch according to claim 13, wherein the transformer comprises a transformer core and a secondary winding, wherein the average gap between the transformer core and the majority of the secondary winding is greater than 0.5 inches.

19. The high voltage switch according to claim 13, wherein the transformer comprises a transformer core, a primary winding, and a secondary winding, wherein the average gap between the majority of the primary winding and the majority of the secondary winding is greater than 0.5 inches.

20. The high voltage switch according to claim 13, wherein each switch module is configured to switch at least 5 W of power.

21. The high voltage switch according to claim 13, wherein the transformer comprises a transformer core and a secondary winding, wherein the secondary winding comprises a plurality of wires having a cross section with a width to thickness ratio less than 3.

22. The high voltage switch according to claim 13, wherein the gate trigger comprises an isolated fiber optic trigger.

23. A method comprising:

closing a first switch of a plurality of switches, the plurality of switches comprising n switches, while opening n−

1 switches of the plurality of switches for a first plurality of time, wherein the plurality of switches are electrically and/or inductively coupled with a power supply that produces a high voltage V that is greater than 5 kV;

outputting an output switched pulses with a voltage

24. The method according to claim 23, wherein the load comprises a plasma having a capacitance less than about 20 nF.

25. The method according to claim 23, wherein one or more of the first period of time, the second period of time, the second-to-last period of time, and the n^th period of time are less than 100 ms.

26. The method according to claim 23, wherein the output switched pulses have a rise time less than about 20 ns.

27. The method according to claim 23, wherein the output switched pulses have a frequency greater than about 10 kHz.

28. The method according to claim 23, wherein the output wherein one or more of the first period of time, the second period of time, the second-to-last period of time, and the n^th period of time are less than 5 ms.