×

ARC DEPOSITION PROCESS AND APPARATUS

  • US 3,625,848 A
  • Filed: 12/26/1968
  • Issued: 12/07/1971
  • Est. Priority Date: 12/26/1968
  • Status: Expired due to Term
First Claim
Patent Images

2. The method according to claim 1 wherein a beam gun is provided in said chamber having a cathode constructed of said source material, and said electrode is an anode of said beam gun, said arc discharge being generated between said cathode and anode to emit particles from said cathode.

View all claims
  • 7 Assignments
Timeline View
Assignment View
    ×
    ×