Vacuum monitoring

  • US 4,008,619 A
  • Filed: 11/17/1975
  • Issued: 02/22/1977
  • Est. Priority Date: 11/17/1975
  • Status: Expired due to Term
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First Claim
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1. Apparatus for monitoring the change in the electrical resistive condition from an initially determined resistive condition of a layer of highly-reactive getter material located at an initially substantially evacuated site which is rendered physically inaccessible by sealing, comprising at least a pair of electrically-isolated electrically-conductive members each having surfaces both within and remote from said site, electrically-insulating material sealed with said members and preserving the electrically-isolated relationship thereof while disposing surface area therebetween at said site, a continuous layer of said getter material deposited upon said surface area and making electrical contacts with said surfaces of both of said conductive members within said site, and electrical measurement means remote from said site electrically coupled with said conductive members and responsive to said change as exhibited by said layer as a result of its reaction with gases present at said site, thereby to provide an external indication of the degree of degradation of the initial evacuation at said site prior to the exhaustion of the getter.

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