Vacuum monitoring

• US 4,008,619 A
• Filed: 11/17/1975
• Issued: 02/22/1977
• Est. Priority Date: 11/17/1975
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Ewing, James H., Alcaide, H. David
• Primary Examiner(s): Scovronek, Joseph
• Application Number:
  US05/632,460
• Time in Patent Office: 463 Days
• Field of Search: 23/232 E, 23/254 E, 23/255 E, 427/10, 427/109, 427/123, 73/398 R, 73/398 C, 73/398 AR, 29/593, 29/620, 324/65 R, 324/65 US, 340/237 R, 340/237 US, 338/13 US, 317/24 G, 317/24 US
• US Class Current: 73/724
• CPC Class Codes: G01L 9/0051 using variations in ohmic resistance
• CPC Class Codes: G01L 9/0072 using variations in capacitance
• CPC Class Codes: G01L 9/12 by making use of variations in capacitance , i.e. electric circuits therefor
• CPC Class Codes: G01M 3/16 using electric detection means G01M3/045, G01M3/06, G01M3/12, G01M3/20, G01M3/24, G01M3/26 take precedence
• CPC Class Codes: Y10T 29/49004 including measuring or testing of device or component part

Abstract

Monitoring of gas contamination and of related deviations in pressures within a sealed cavity is effected by way of electrical-network responses to conduction characteristics of a thin-film deposit of getter material within the cavity, the getter film being deposited upon inert insulation between conductive contacts externally connected into an electrical circuit which controls related output signalling in accordance with conductance changes caused by getter material reactions with gas within the cavity.

Claims

1. Apparatus for monitoring the change in the electrical resistive condition from an initially determined resistive condition of a layer of highly-reactive getter material located at an initially substantially evacuated site which is rendered physically inaccessible by sealing, comprising at least a pair of electrically-isolated electrically-conductive members each having surfaces both within and remote from said site, electrically-insulating material sealed with said members and preserving the electrically-isolated relationship thereof while disposing surface area therebetween at said site, a continuous layer of said getter material deposited upon said surface area and making electrical contacts with said surfaces of both of said conductive members within said site, and electrical measurement means remote from said site electrically coupled with said conductive members and responsive to said change as exhibited by said layer as a result of its reaction with gases present at said site, thereby to provide an external indication of the degree of degradation of the initial evacuation at said site prior to the exhaustion of the getter.

2. Apparatus as set forth in claims 1 wherein said site comprises a sealed and substantially evacuated cavity, wherein said conductive members include at least one feed-through conductor extending through a wall of said cavity and sealed therewith in insulated relationship thereto by said electrically-insulating material, and wherein said electrical measurement means includes an electrical circuit and means coupling electrical resistance exhibited by said layer into said circuit as a part thereof.

3. Apparatus as set forth in claim 2 wherein said circuit includes in another part thereof means exhibiting an electrical property having a value which is in a predetermined relationship to the electrical resistance exhibited by said layer between its said contacts while substantially unreacted with gas molecules, whereby the electrical relationships of said parts characterize the extents of reactions of said layer with gas molecules in said cavity.

4. Apparatus as set forth in claim 3 wherein said layer consists essentially of barium, wherein said cavity comprises the reference cavity of an absolute pressure sensor which includes a measurement cavity exposed to pressures which are to be measured and a deflectable diaphragm separating the two cavities and maintaining a sealed relationship with them, and wherein said electrical measurement means further includes signalling means responsive to said resistance and signalling said extents of said reactions.

5. Apparatus as set forth in claim 3 wherein said electrical measurement means further includes amplifier means responsive to electrical output signals from said circuit related to said resistance, and signalling means responsive to outputs from said amplifier means characterizing the occurrence of a predetermined resistance condition and thereby signalling that said layer is about to lose its capability to react significantly with gas molecules in said cavity.

6. Apparatus as set forth in claim 5 wherein said signalling means is also responsive to outputs from said amplifier means characterizing the occurrence of another resistance condition and thereby signals that said layer has substantially lost its capability to react significantly with gas molecules in said cavity.

7. Apparatus as set forth in claim 6 wherein said signalling means is also responsive to outputs from said amplifier means characterizing that the resistance condition is within a predetermined range and thereby signals that said layer retains the capability to react significantly with gas molecules in said cavity and maintain substantially a predetermined low pressure in said cavity.

8. Apparatus as set forth in claim 7 wherein said signalling means include light-emitting diodes, means connecting one of said diodes to emit responsive to said amplifier outputs characterizing said other predetermined condition, means connecting another of said diodes to emit responsive to said amplifier outputs characterizing that said condition is within said predetermined range, said connecting means also connecting both of said diodes to emit simultaneously responsive to said amplifier outputs characterizing said predetermined condition.

9. Apparatus as set forth in claim 5 wherein said predetermined resistance condition is a resistance of said layer which is of the order of about one and one-half times that which it exhibits when initially deposited.

10. Apparatus for monitoring the extents to which a highly-reactive getter material reacts with gas molecules within a cavity which has been substantially evacuated and sealed, comprising a combined electrical-connector and sensing unit in the form of a coaxial connector sealed with a wall of said cavity and extending therethrough, said unit including a first feed-through conductor and vitreous electrically-insulating material sealed with said conductor and presenting an insulating surface within said cavity, a continuous layer of getter material consisting essentially of barium deposited upon said insulating surface and making electrical contact both with said conductor and with another conductive surface to which low-resistance electrical connection is accessible outside of said cavity, an electrical heating element carrying a barium compound capable of releasing barium vapor when heated, means supporting said element within said cavity in close proximity with said electrically-insulating surface and said conductor for direction of barium vapor thereupon, shield means supported within said cavity in at least partially enclosing relation to said element and physically blocking the passage of barium vapor in at least certain paths away from said element, and means including at least a second feed-through conductor for forcing electrical current through said heating element to occasion release of barium vapor therefrom, whereby electrical resistance of said layer of getter material is exhibited between said conductor and said other conductive surface and characterizes said extents to which said material reacts with gas molecules.

11. The method of monitoring the condition of a highly-reactive getter material at a site rendered physically inaccessible by sealing, which comprises vapor-depositing a thin continuous layer of the getter material at that site atop an electrically-insulating surface and atop at least a pair of conductive members which are spaced apart with the insulating surface therebetween, and electrically detecting and characterizing the electrical resistance exhibited by the deposited layer between the conductive members.

12. The method as set forth in claim 11 wherein the step of vapor-depositing the layer of getter material comprises electrically flashing a quantity of barium-containing material at said site and directing the resulting vapor onto the insulating surface and conductive members to form a continuous layer of barium, and wherein the step of detecting and characterizing the resistance of the layer includes connecting the conductive members into an electrical bridge network with the resistance of the barium layer as an arm thereof and setting the resistance of another arm thereof at a value which is in a predetermined relationship to the value of the layer resistance when initially deposited.

13. The method as set forth in claim 12 which further comprises detecting when a predetermined increase has occurred in the value of resistance of the layer in relation to its value of resistance when initially deposited, and thereupon signalling that the layer of barium is about to lose its capability to react with gas molecules at that site.

14. The method as set forth in claim 13 which further comprises detecting when another predetermined increase has occurred in the value of resistance of the layer in relation to its value of resistance when initially deposited, and thereupon signalling that the layer of barium has substantially lost its capability to react significantly with gas molecules at that site.

15. The method as set forth in claim 14 which further comprises detecting when the value of resistance of the layer is not in excess of a predetermined ratio to its value of resistance when initially deposited, and, in response to said detecting, signalling that the layer of barium retains its capability to react with gas molecules at that site.

16. The method as set forth in claim 13 wherein the setting of resistance of the other arm involves setting that resistance at a value which is of the other of about one and one-half times the lowest value at which resistance in the other arm results in the signalling while the resistance of the layer is about that which it exhibits when initially deposited.