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Selective chemical sensitive FET transducers

  • US 4,020,830 A
  • Filed: 03/12/1975
  • Issued: 05/03/1977
  • Est. Priority Date: 03/12/1975
  • Status: Expired due to Term
First Claim
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1. A chemical sensitive field-effect transistor transducer unit for detecting chemical properties of substances to which the unit is exposed and including a transducer which comprises:

  • a semi-conductor substrate having a doping polarity,a pair of spaced apart diffusion regions located at the surface of said substrate material,an electrical insulator material overlying at least a portion of said diffusion regions and the surface of the substrate material lying between the diffusion regions,a chemical selective system containing a chemical selective membrane overlying said insulator material, anda reference electrode connected in circuit relationship with said spaced apart diffusion regions through a potential source such that a potential is created and added to the potential generated in the chemical selective membrane the combination of which affects the conductivity between said diffusion regions as a measure of the chemical properties of said substances.

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