Method for forming a non-epitaxial bipolar integrated circuit

• US 4,111,720 A
• Filed: 03/31/1977
• Issued: 09/05/1978
• Est. Priority Date: 03/31/1977
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Schwenker, Robert O., Ziegler, James F., Michel, Alwin E.
• Primary Examiner(s): Dean, R.
• Assistant Examiner(s): Roy, Upendra
• Application Number:
  US05/783,245
• Time in Patent Office: 523 Days
• Field of Search: 148/1.5, 357/34, 357/91, 357/50
• US Class Current: 438/334
• CPC Class Codes: H01L 21/2652 Through-implantation
• CPC Class Codes: H01L 21/74 Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
• CPC Class Codes: H01L 29/36 characterised by the concentration or distribution of impurities in the bulk material within semiconductor regions H01L29/06

Abstract

A method for forming a non-epitaxial bipolar integrated circuit comprising first forming in a silicon substrate of one-type of conductivity, recessed silicon dioxide regions extending into the substrate and laterally enclosing at least one silicon substrate region of said one-type conductivity. Then, forming by ion implantation the first region of opposite-type conductivity which is fully enclosed laterally by said recessed silicon dioxide. This region is formed by directing a beam of ions of opposite-type conductivity impurity at said enclosed silicon region at such energy and dosage levels that the opposite conductivity-type impurity introduced into the substrate in said region will have a concentration peak at a point below the surface of this first region. Then, a region of said one-type conductivity is formed which extends from the surface into said first opposite-type conductivity region to a point between said concentration peak and said surface. Next, a second region of said opposite-type conductivity is formed which extends from the surface part way into said region of one-type conductivity.

Preferably, the ion beam energy level is at least one MeV, and said concentration peak is at least one micron below the surface. It is further preferable that the energy and dosage levels of the beam of ions are selected so that the opposite-type conductivity impurity has a more gradual distribution gradient between the peak and the surface than between the peak and the junction of the first region with the substrate.

Claims

1. A method for forming an integrated circuit comprising;

forming in a silicon substrate of one-type conductivity, recessed silicon dioxide regions extending into said substrate and laterally enclosing at least one silicon substrate region of said one-type conductivity,

directing a beam of ions of opposite-type conductivity impurities at said enclosed silicon region at energy and dosage levels sufficient to form a first region of said opposite-type conductivity defined and fully enclosed laterally by said recessed silicon dioxide regions,

said opposite-type conductivity impurity having a concentration peak at a point below the surface of said first region

forming a second region of said one-type conductivity extending from said surface into said opposite-type conductivity region to a point between said concentration peak and said surface, and

forming a second region of said opposite-type conductivity extending from said surface part way into said second region of one-type conductivity.

2. The method of claim 1 wherein said concentration peak is at least 1 micron below said surface.

3. The method of claim 1 further including conductive contacts to said regions and means for applying voltage levels respectively to said contacts whereby said first region of opposite-type conductivity functions as a collector, said second region of one-type conductivity functions as a base and said second region of opposite-type conductivity functions as an emitter of a bipolar transistor.

4. The method of claim 1 further including conductive contacts to said regions and means for applying voltage levels respectively to said contacts whereby said first region of opposite-type conductivity functions as an emitter, said second region of one-type conductivity functions as a base and said second region of opposite-type conductivity functions as a collector of a bipolar transistor.

5. The method of claim 1 wherein said recessed silicon dioxide regions are formed by first converting silicon substrate regions to porous silicon and then oxidizing said porous silicon to silicon dioxide.

6. The method of claim 1 wherein said silicon substrate regions are converted to porous silicon by the steps of

increasing the one-type conductivity impurity concentration in the regions to be converted and

anodically etching the substrate to selectively convert said high impurity concentration region to porous silicon.

7. The method of claim 1 wherein said second region of said one-type conductivity and said second region of opposite-type conductivity are formed by ion implantation.

8. The method of claim 2 wherein said beam energy level is at least 1 MeV.

9. The method of claim 8 wherein said energy and dosage levels of said beam of ions are selected so that said opposite-type conductivity impurity has a more gradual distribution gradient between said peak and said surface than between said peak and the junction of said first region of opposite-type conductivity with said substrate.

10. The method of claim 9 wherein said opposite-type conductivity impurity has a C₀ of at least 10¹⁵ atoms/cm³.

11. The method of claim 10 wherein said peak has an impurity concentration of at least 5 ×

10¹⁸ atoms/cm³.

12. The method of claim 10 wherein said opposite-type impurity is phosphorous provided by phosphene source and the surface concentration of the phosphorous atoms is controlled by controlling the concentration of (³¹ P)₄⁺ ions in said beam.

13. The method of claim 11 wherein said opposite-type conductivity impurity has a concentration of less than 10¹⁷ atoms/cm³ at the junction between said first region of opposite-type conductivity and said second region of one-type conductivity extending into said first region.