High registration photomask method and apparatus

• US 4,120,583 A
• Filed: 12/20/1976
• Issued: 10/17/1978
• Est. Priority Date: 12/28/1970
• Status: Expired due to Term

• Current Assignee: Gilbert P. Hyatt
• Original Assignee: Gilbert P. Hyatt
• Inventors: Hyatt, Gilbert P.
• Primary Examiner(s): Wintercorn, Richard A.
• Application Number:
  US05/752,751
• Time in Patent Office: 666 Days
• Field of Search: 355/86, 355/95, 355/132, 355/133, 340/173 LM, 340/221
• US Class Current: 355/86
• CPC Class Codes: B60R 16/0373 Voice control in general G10L
• CPC Class Codes: F21V 23/00 Arrangement of electric circuit elements in or on lighting devices characterised by cooling arrangements F21V29/508
• CPC Class Codes: G01S 15/897 using application of holographic techniques
• CPC Class Codes: G01S 15/8977 using special techniques for image reconstruction, e.g. FFT, geometrical transformations, spatial deconvolution, time deconvolution
• CPC Class Codes: G01S 7/52026 Extracting wanted echo signals Doppler systems G01S15/50; Doppler short range imaging systems G01S15/8979
• CPC Class Codes: G02F 1/13318 Circuits comprising a photodetector
• CPC Class Codes: G03F 9/7049 Technique, e.g. interferometric
• CPC Class Codes: G03F 9/7088 Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
• CPC Class Codes: G04G 99/006 Electronic time-pieces using a microcomputer, e.g. for multi-function clocks
• CPC Class Codes: G05B 19/351 the positional error is used to control continuously the servomotor according to its magnitude
• CPC Class Codes: G05B 19/408 characterised by data handling or data format, e.g. reading, buffering or conversion of data
• CPC Class Codes: G05B 19/4083 Adapting programme, configuration
• CPC Class Codes: G05B 19/4086 Coordinate conversions; Other special calculations
• CPC Class Codes: G05B 19/409 characterised by using manual data input [MDI] or by using control panel, e.g. controlling functions with the panel; characterised by control panel details or by setting parameters G05B19/408, G05B19/4093 take precedence
• CPC Class Codes: G05B 19/4093 characterised by part programming, e.g. entry of geometrical information as taken from a technical drawing, combining this with machining and material information to obtain control information, named part programme, for the NC machine
• CPC Class Codes: G05B 19/414 Structure of the control system, e.g. common controller or multiprocessor systems, interface to servo, programmable interface controller
• CPC Class Codes: G05B 19/4142 characterised by the use of a microprocessor G05B19/4141 takes precedence
• CPC Class Codes: G05B 2219/23094 Debounce key
• CPC Class Codes: G05B 2219/33182 Uart, serial datatransmission, modem
• CPC Class Codes: G05B 2219/34023 Risc processor
• CPC Class Codes: G05B 2219/34098 : Slope fitting, fairing contour, curve fitting, transition
• CPC Class Codes: G05B 2219/34471 : Program memory is inhibited, not accessible as long as power fails
• CPC Class Codes: G05B 2219/34472 : Configure alterable memory as read only, to avoid erasing
• CPC Class Codes: G05B 2219/35262 : Macro instruction, canned cycles, subroutines, subprogram
• CPC Class Codes: G05B 2219/35263 : Using variables, parameters in program, macro, parametrized instruction
• CPC Class Codes: G05B 2219/35373 : Data storage, buffer
• CPC Class Codes: G05B 2219/35381 : Convert in real time input peripheral data to processor data, ouput data format
• CPC Class Codes: G05B 2219/35431 : Interactive
• CPC Class Codes: G05B 2219/35436 : Means, manual input, input reference, hand wheel
• CPC Class Codes: G05B 2219/35453 : Voice announcement, oral, speech input
• CPC Class Codes: G05B 2219/35472 : Mode selection
• CPC Class Codes: G05B 2219/35554 : Mirror, other conversions
• CPC Class Codes: G05B 2219/35588 : Pack, compress data efficiently in memory
• CPC Class Codes: G05B 2219/36152 : Panel
• CPC Class Codes: G05B 2219/36227 : Assist operator to calculate unknown points, contours
• CPC Class Codes: G05B 2219/36333 : Selection from standard forms, shapes, partprograms, enter value for variable
• CPC Class Codes: G05B 2219/36366 : Data, read in, distribution
• CPC Class Codes: G05B 2219/36379 : Read in
• CPC Class Codes: G05B 2219/36395 : Load local computer program from host, data transfer ram to rom, BTR
• CPC Class Codes: G05B 2219/36502 : Ram for variable servo data, rom for fixed servo routine
• CPC Class Codes: G05B 2219/36503 : Adapt program to real coordinates, software orientation
• CPC Class Codes: G05B 2219/36506 : Store in Rom and Ram
• CPC Class Codes: G05B 2219/36546 : Memory protection, protected fields
• CPC Class Codes: G05B 2219/41021 : Variable gain
• CPC Class Codes: G05B 2219/42237 : Pwm pulse width modulation, pulse to position modulation ppm
• CPC Class Codes: G05B 2219/45214 : Gear cutting
• CPC Class Codes: G05B 2219/45215 : Thread cutting
• CPC Class Codes: G05B 2219/49221 : Control of scale
• CPC Class Codes: G05B 2219/50047 : Positioning, indexing
• CPC Class Codes: G05B 2219/50048 : Jogging
• CPC Class Codes: G05B 2219/50083 : Power loss, measures again loss of power
• CPC Class Codes: G05B 2219/50151 : Orient, translate, align workpiece to fit position assumed in program
• CPC Class Codes: G06J 1/00 : Hybrid computing arrangements digitally-programmed analogue computers G06G7/06
• CPC Class Codes: G07G 1/12 : electronically operated digital data processing aspects G06Q20/00
• CPC Class Codes: G10L 19/00 : Speech or audio signals analysis-synthesis techniques for redundancy reduction, e.g. in vocoders; Coding or decoding of speech or audio signals, using source filter models or psychoacoustic analysis in musical instruments G10H
• CPC Class Codes: G11C 11/565 : using capacitive charge storage elements
• CPC Class Codes: G11C 16/3418 : Disturbance prevention or evaluation; Refreshing of disturbed memory data
• CPC Class Codes: G11C 16/3431 : Circuits or methods to detect disturbed nonvolatile memory cells, e.g. which still read as programmed but with threshold less than the program verify threshold or read as erased but with threshold greater than the erase verify threshold, and to reverse the disturbance via a refreshing programming or erasing step
• CPC Class Codes: G11C 19/287 : Organisation of a multiplicity of shift registers
• CPC Class Codes: G11C 19/36 : using multistable semiconductor elements
• CPC Class Codes: G11C 27/00 : Electric analogue stores, e.g. for storing instantaneous values
• CPC Class Codes: G11C 27/04 : Shift registers
• CPC Class Codes: G11C 7/1042 : using interleaving techniques, i.e. read-write of one part of the memory while preparing another part
• CPC Class Codes: G11C 7/16 : Storage of analogue signals in digital stores using an arrangement comprising analogue/digital [A/D] converters, digital memories and digital/analogue [D/A] converters
• CPC Class Codes: Y02P 90/02 : Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A machine and a control system are provided for generating high registration photomasks with a contact printing arrangement. Further, a unique control arrangement is provided for controlling a machine such as a high registration contact print machine or other type of machine. In a preferred embodiment, a control system generates signals to a step and repeat contact printing machine that exposes many prints of master die images on a photographic film, where these prints have a high registration characteristic. In a further embodiment a unique control arrangement is provided for machine control operations.

Claims

1. A contact exposure system for providing duplicate exposures of high registration images, said contact exposure system comprising:

master image means for providing high registration images to be duplicated, said master image means including a plurality of images having high registration therebetween;

an illumination sensitive medium for providing illumination exposures in response to an illuminated master image means;

contact exposure means for providing contact between said master image means and said illumination sensitive medium; and

illumination means for illuminating said master image means to provide an exposure of said master image means on said illumination sensitive medium when in said contact therebetween.

2. A contact exposure system comprising:

control means for generating control signals, said control means including means for generating high registration control signals and means for generating duplication control signals; and

a machine for generating high registration exposures in response to the high registration control signals and for generating a duplication exposure in response to the duplication control signals.

3. The machine as set forth in claim 2 above comprising:

(a) master means for containing a master image;

(b) medium means for containing an illumination sensitive medium;

(c) motion means for generating translation motion between said master means and said illumination sensitive medium;

(d) means for generating contact between said master image and said illumination sensitive medium; and

(e) means for generating a contact exposure of said master image on said illumination sensitive medium.

4. The machine as set forth in claim 2 above comprising:

means for providing translation motion to each of a plurality of positions in response to the high registration control signals;

means for generating a contact exposure at each of the plurality of positions in response to the high registration control signals to provide a plurality of high registration exposures; and

means for generating the contact exposure at a single position to provide a single duplication exposure.

5. A mask duplicating machine comprising:

master image means for generating high registration masks, said master image means including a plurality of images having high registration therebetween;

an illumination sensitive medium for providing exposures in response to exposure illumination;

control means for generating control signals; and

a contact exposure machine for generating contact exposures of said master image means on said illumination sensitive medium in response to the control signals, said contact exposure machine including

(a) means for providing contact between said master image means and said illumination sensitive medium and

(b) means for providing exposure illumination to expose said illumination sensitive medium with said master image means.

6. An illumination control system for generating high registration exposures, said illumination control system comprising:

an illumination sensitive medium for providing illumination exposures and

high registration means for contact exposing said illumination sensitive medium with a plurality of image clusters, each of the image clusters having high registration with at least one other image cluster, said high registration means including master image means for providing a plurality of images wherein each image of said master image means is related to an exposed image cluster.

7. The system as set forth in claim 6 above further comprising duplicating means for exposing said illumination sensitive medium with a master image to provide a duplicate of said master image.

8. A machine control system comprising:

input means for generating an input command signal;

a read only memory for storing instructions;

receiving means for receiving the input command signal in response to the stored instructions;

processing means for processing machine command information in response to the input command signal received with said receiving means under control of the stored instructions; and

output means for generating at least one machine command signal in response to the processing of machine command information.

9. The system as set forth in claim 8 above, further comprising a machine for exposing an illumination sensitive medium in response to the machine command signal from said output means.

10. The machine as set forth in claim 9 above, including:

illumination means for generating illumination;

exposing means for exposing an illumination medium in response to the generated illumination; and

positioning means for providing relative positioning between said illumination means and said exposing means in response to the machine command signal from said output means.

11. The system as set forth in claim 8 above, further comprising:

positioning means for providing positioning of a machine in response to the machine command signal from said output means and

contact exposing means for generating a contact exposure of an illumination sensitive medium under control of the machine command signal from said output means.

12. The memory as set forth in claim 8 above, including an integrated circuit read only memory for storing the instructions and alterable memory means for storing the processed machine command information under control of the stored instructions from said read only memory means.

13. A machine control system comprising:

read only memory means for storing data processing instructions;

alterable memory means for storing processed information in response to the stored data processing instructions from said read only memory means;

data processing means for processing the information stored in said alterable memory means in response to the stored data processing instructions from said read only memory means;

output means for generating at least one output command signal in response to the processing of information with said processing means under control of stored data processing instructions from said read only memory means; and

a positioning machine for providing a machine operation at each of a plurality of different positions, in response to the output command signal said machine means including

a. positioning means for positioning said machine to each of a plurality of machine positions and

b. operation means for performing the machine operation at each of the plurality of different machine positions.

14. The system as set forth in claim 13 above, wherein said system is a contact exposure system for providing contact exposure of an illumination sensitive medium, said positioning machine further including

illuminating means for generating illumination and

exposing means for exposing an illumination sensitive medium in response to the illumination from said illumination means, wherein said exposing means includes contact means for providing a contact exposure of an illumination sensitive medium in response to the generated illumination from said illumination means.

15. An integrated circuit mask generating system for simultaneously generating a plurality of different integrated circuit masks, wherein each of the plurality of masks is related to a different integrated circuit process operation for manufacture of integrated circuits, said system comprising:

illumination means for providing exposure illumination and

contact exposure means for exposing an illumination sensitive medium in response to contact exposures to photographically generate the masks.

16. A machine control system comprising:

command means for generating machine command signals, said command means including

a. memory means for storing a program,

b. processing means for generating machine command signals under control of the program stored in said memory means, and

c. output means for outputting the machine command signals generated with said processing means under control of the program stored in said memory means; and

machine means for modifying a machine responsive medium in response to the machine command signals ouput from said output means, said machine means including

d. modifying means for modifying a machine modifiable medium mounted on a mounting means,

e. mounting means for mounting a medium to be modified,

f. means for providing relative motion between said modifying means and said mounting means, and

g. means for providing contact between said modifying means and a modifiable medium mounted with said mounting means.

17. The memory means as set forth in claim 16 above, including read only memory means for storing the program and alternate memory means for storing information processed with said processing means, wherein said alterable memory means provides for the storing of the processed information under control of the program stored in said read only memory.

18. The system as set forth in claim 16 above, wherein said system is a high registration system for generating photographic masks.

21. The system as set forth in claim 16 above, wherein said system is a high registration mask producing system and wherein said contact providing means includes contact exposure means for exposing an illumination sensitive medium.

19. A machine control system comprising:

command means for generating machine command signals, said command means including

a. memory means for storing a program,

b. processing means for generating machine command signals under control of the program stored in said memory means, and

c. output means for outputting the machine command signals generated with said processing means under control of the program stored in said memory means; and

machine means for modifying a machine responsive medium in response to the machine command signals output from said output means, said machine means including

d. modifying means for modifying a machine modifiable medium, wherein said modifying means includes a cutting tool for cutting a machine modifiable medium,

e. mounting means for mounting a medium to be modified, wherein said mounting means includes means for mounting a metal workpiece to be modified with said cutting tool,

f. means for providing relative motion between said modifying means and said mounting means, and

g. means for providing contact between said modifying means and a modifiable medium mounted with said mounting means.

28. The system as set forth in claim 19 above, wherein said memory means includes an integrated circuit read only memory for storing the program in read only form, said system further comprising an integrated circuit alterable memory for storing information processed with said processing means under control of the program stored in said integrated circuit read only memory.

29. The system as set forth in claim 19 above, further comprising display means for displaying machine related information to an operator in reponse to display signals, wherein said command means further includes means for generating the display signal in response to the program stored in said memory means.

20. The machine means as set forth in clam 16 above, further comprising means for generating illumination and means for providing a contact exposure of an illumination sensitive medium.

22. A control system comprising:

input means for generating input command signals;

a stored program computer for generating machine command signals in response to the input command signals, said stored program computer including read only memory means for storing a computer program, alterable memory means for storing operands, in response to the input command signals processing means for processing the operands stored in said alterable memory means in response to the computer program stored in said read only memory means, and computer output means for outputting the machine command signals in response to the processing of the operands with said processing means; and

machine means for generating a machine operation in response to the machine command signals output from said computer output means.

23. The system as set forth in claim 22 above, wherein said machine means includes illumination means for generating illumination and contact exposure means for providing contact exposure of an illumination sensitive medium in response to the illumination.

24. The system as set forth in claim 22 above, further comprising means for providing relative motion between said illumination means and said contact exposure means in response to the machine command signals output from said computer output means.

25. A control system comprising:

input means for generating input command signals;

a stored program computer for generating machine command signals in response to the input command signals, said stored program computer including a read only memory for storing a computer program, an alterable memory for storing operands, processing means for processing the operands stored in said alterable memory in response to the command input signals under control of the computer program stored in said read only memory, and computer output means for outputting the machine command signals in response to the processing of the operands with said processing means; and

a machine for generating a machine operation in response to the machine command signals output from said computer output means, wherein said machine is a machine tool, wherein said machine tool includes cutting means for cutting a metal part and mounting means for mounting a metal part to be cut.

30. The system as set forth in claim 25 above, further comprising:

operator input means for generating an operator input signal in response to operator action;

display means for providing an operator display in response to a display signal, wherein said computer further includes

a. means for generating the display signal in response to the operator input signal under control of the computer program stored in said read only memory and

b. means for generating the machine command signals output with said computer output means in response to the operator input signal under control of the computer program stored in said read only memory.

31. The system as set forth in claim 25 above, wherein said computer output means includes pulse modulation means for outputting the machine command signals as pulse modulated command signals in response to the computer program stored in said read only memory.

32. The system as set forth in claim 25 above, further comprising feedback means for generating a feedback signal in response to condition of said machine, wherein said computer further includes means for processing the operands in response to the feedback signal under control of the computer program stored in said read only memory.

33. The system as set forth in claim 25 above, wherein said system is a path control system, said system further comprising contouring means for controlling said machine along a path in response to the machine command signals.

34. The system as set forth in claim 25 above, wherein said machine further includes relay control means for controlling a relay in response to the machine command signals.

35. The system as set forth in claim 25 above, wherein said machine further includes a machine turret for positioning a machine element under control of the machine command signals.

36. The system as set forth in claim 25 above, wherein said machine further includes a magnetic control element for providing a mechanical control operation under control of the machine command signals.

26. In a system for generating photographic masks to be used in a photochemical process, a method comprising the steps of:

first, simultaneously exposing an illumination sensitive medium with each of a plurality of images having a fixed relationship between the position of each image of the plurality of images;

second, changing relative position between the plurality of images and the illumination sensitive medium and preserving the positional relationship between each of the plurality of images; and

third, repeating said first and second steps for a plurality of different times to provide the exposure at a plurality of different relative positions between the images and the illumination sensitive medium.

27. The method as set forth in claim 26 above, wherein the simultaneous exposing step includes the step of providing a contact exposure.