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Mechanically biased semiconductor strain sensitive microphone

  • US 4,182,937 A
  • Filed: 09/21/1978
  • Issued: 01/08/1980
  • Est. Priority Date: 09/21/1978
  • Status: Expired due to Term
First Claim
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1. A microphone transducer element of the type in which acoustic vibration generates corresponding resistance changes, including:

  • at least two semiconductor plate members;

    an integral flexible laminar semiconductor support upon which said plate members are situated; and

    at least one laminar semiconductor filament for interconnecting said plate members such that said at least one filament is strain-sensitive.

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