Pressure transducer
First Claim
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1. A pressure transducer comprising:
- a housing;
a semiconductor pressure sensor mounted in said housing;
high-pressure side and low-pressure side flanges fixed to said housing so as to define a high-pressure side space between said high-pressure side flange and one surface of said sensor and a low-pressure side space between said low-pressure side flange and the opposite surface of said sensor, respectively;
a high-pressure seal diaphragm provided in said high-pressure side space to divide said space into a first space to which said one surface of said sensor is exposed and a second space in which a high-pressure fluid is introduced;
a high-pressure side sealed liquid filled in said first space;
means for mounting said high-pressure seal diaphragm such that said high-pressure sealed liquid receives a pressure substantially the same as the pressure of said high-pressure fluid introduced into said second space through said high-pressure seal diaphragm at least until said pressure of said high-pressure fluid exceeds a pressure value at which said semiconductor pressure sensor may be broken;
a low-pressure seal diaphragm provided in said low-pressure side space to separate it into a third space to which said opposite surface of said sensor is exposed and a fourth space in which atmosphere is introduced;
a low-pressure side sealed liquid filled in said third space; and
a protective member provided in said fourth space and disposed to be normally spaced from said low-pressure seal diaphragm by an amount equal to the maximum permissible deflection of said low-pressure seal diaphragm in response to a high pressure so as to protect said low-pressure seal diaphragm against the force of said high-pressure fluid when said sensor and said high-pressure seal diaphragm are accidentally destroyed by the pressure applied thereto.
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Abstract
A pressure transducer is arranged to mount a semiconductor pressure sensor in a housing such that the pressure of a high-pressure fluid is applied to one side of the semiconductor pressure sensor through a high pressure seal diaphragm and a sealed liquid in the high pressure side, while the pressure of a low-pressure fluid is applied to the other side of the sensor through a low-pressure seal diaphragm and a sealed liquid in the low pressure side, and a protecting member is provided closer to the low-pressure seal diaphragm.
41 Citations
6 Claims
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1. A pressure transducer comprising:
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a housing; a semiconductor pressure sensor mounted in said housing; high-pressure side and low-pressure side flanges fixed to said housing so as to define a high-pressure side space between said high-pressure side flange and one surface of said sensor and a low-pressure side space between said low-pressure side flange and the opposite surface of said sensor, respectively; a high-pressure seal diaphragm provided in said high-pressure side space to divide said space into a first space to which said one surface of said sensor is exposed and a second space in which a high-pressure fluid is introduced; a high-pressure side sealed liquid filled in said first space; means for mounting said high-pressure seal diaphragm such that said high-pressure sealed liquid receives a pressure substantially the same as the pressure of said high-pressure fluid introduced into said second space through said high-pressure seal diaphragm at least until said pressure of said high-pressure fluid exceeds a pressure value at which said semiconductor pressure sensor may be broken; a low-pressure seal diaphragm provided in said low-pressure side space to separate it into a third space to which said opposite surface of said sensor is exposed and a fourth space in which atmosphere is introduced; a low-pressure side sealed liquid filled in said third space; and a protective member provided in said fourth space and disposed to be normally spaced from said low-pressure seal diaphragm by an amount equal to the maximum permissible deflection of said low-pressure seal diaphragm in response to a high pressure so as to protect said low-pressure seal diaphragm against the force of said high-pressure fluid when said sensor and said high-pressure seal diaphragm are accidentally destroyed by the pressure applied thereto. - View Dependent Claims (3, 4, 5)
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2. A pressure transducer comprising:
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a housing defining a pressure measuring chamber which is opened at each of opposing sides of said housing; a hollow retaining member mounted in said pressure measuring chamber and having a hollow portion extending between said opposing sides of said housing; a semiconducor pressure sensor mounted to said retaining member so as to cover one end of said hollow portion, a high-pressure seal diaphragm mounted to said housing to define a closed first space to which one surface of said sensor is exposed; a high-pressure side sealed liquid filled in said first space; a high-pressure flange fixed to said housing so as to define a second space separated from said first space by said high-pressure seal diaphragm and having a passage for introducing a high pressure fluid into said second space; means for mounting said high-pressure seal diaphragm such that said high-pressure sealed liquid receives a pressure substantially the same as the pressure of said high-pressure fluid introduced into said second space through said high-pressure seal diaphragm at least until said pressure of said high-pressure fluid exceeds a pressure value at which said semiconductor pressure sensor may be broken; a low-pressure seal diaphragm mounted to said housing to define a closed third space to which the other surface of said sensor is exposed; a low-pressure side sealed liquid filled in said third space; a low-pressure flange fixed to said housing so as to define a fourth space separated from said third space by said low-pressure seal diaphragm and having a passage for introducing atmosphere into said fourth space; a protective member provided in said fourth space and disposed to be normally spaced from said low-pressure seal diaphragm by an amount equal to the maximum permissible deflection of said low-pressure seal diaphragm in response to a high pressure so as to protect said low-pressure seal diaphragm against the force of said high-pressure fluid when said sensor and said high-pressure seal diaphragm are accidentally destroyed by the pressure applied thereto. - View Dependent Claims (6)
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Specification