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Measurement of small movements

  • US 4,339,954 A
  • Filed: 11/09/1979
  • Issued: 07/20/1982
  • Est. Priority Date: 03/09/1978
  • Status: Expired due to Term
First Claim
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1. A method of measuring the out of plane movement of an oscillating irregular surface, comprising the steps of:

  • illuminating the surface with coherent light, the reflexions and scattering of the coherent light from the surface forming a speckle pattern,detecting with a spatially integrating photodetector, variations caused by the out-of-plane movement in the speckle pattern and generating a photodetector signal indicative thereof andcontinuously detecting, from the photodetector signal, amplitude variations thereof at the frequency of the out-of-plane movement to represent such movement.

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