Gas detector
First Claim
1. A gas detector of the type using an electric heater in which a substrate comprises an upper film and a lower film, said upper film being made of an electrically insulating substance having a resistance to heat while said lower film is made of a substance different from that of said upper film;
- a recess is formed under said upper film by removing part of said lower film; and
an electrically conductive substance is disposed on said upper film at a portion immediately above said recess, thereby providing a heating element, characterized in thatthe heating element consists of a film of a substance having catalytic effects in the presence of a gas to be detected, or a material responsive to a gas to be detected, deposited on said electrically conductive substance, or consists of said electrically conductive substance having catalytic effects in the presence of a gas to be detected or a substance containing said substance having catalytic effects in the presence of a gas to be detected or a substance responsive to a gas to be detected, and said heating element is exposed to a gas to be detected.
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Accused Products
Abstract
A gas detector of the type using an electric heater in which a substrate consists of an upper film of electrically insulating substance having a resistance to heat and a lower film of substance different from the substance of the upper film, a recess is formed below or under the upper film by removing part of the lower film, and a film of electrically conductive substance is deposited over the bridge of the upper film across the recess in the lower film, thereby providing a heating element characterized in that said heating element consists of a film of a substance having catalytic effects in the presence of a gas to be detected deposited on said electrically conductive substance or a material responsive to a gas to be detected, or consists of said electrically conductive substance having catalytic effects in the presence of a gas to be detected or a substance containing said substance having catalytic effects in the presence of a gas to be detected or a substance responsive to a gas to be detected, and said heating element is exposed to a gas to be detected.
86 Citations
17 Claims
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1. A gas detector of the type using an electric heater in which a substrate comprises an upper film and a lower film, said upper film being made of an electrically insulating substance having a resistance to heat while said lower film is made of a substance different from that of said upper film;
- a recess is formed under said upper film by removing part of said lower film; and
an electrically conductive substance is disposed on said upper film at a portion immediately above said recess, thereby providing a heating element, characterized in thatthe heating element consists of a film of a substance having catalytic effects in the presence of a gas to be detected, or a material responsive to a gas to be detected, deposited on said electrically conductive substance, or consists of said electrically conductive substance having catalytic effects in the presence of a gas to be detected or a substance containing said substance having catalytic effects in the presence of a gas to be detected or a substance responsive to a gas to be detected, and said heating element is exposed to a gas to be detected. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
- a recess is formed under said upper film by removing part of said lower film; and
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10. A gas detector of the type using an electric heater in which a substrate comprises an upper film and a lower film, said upper film being made of an electrically insulating substance having a resistance to heat while said lower film being made of a substance different from that of said upper film;
- a recess is formed under said upper film by removing part of said lower film; and
an electrically conductive substance is disposed on said upper film at a portion immediately above said recess, thereby providing a heating element, characterized in that said heating element consists of said electrically conductive substance combined with a substance having catalytic effects in the presence of a gas to be detected or with a substance responsive to a gas to be detected, and said heating element is exposed to a gas to be detected.
- a recess is formed under said upper film by removing part of said lower film; and
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11. A gas detector comprising
(a) a substrate, (b) at least one recess formed in said substrate, (c) an electrically insulating film which is formed to bridge across said recess at the portion at which is formed a heater for detecting a gas, and (d) an electrically conductive film which is formed over said electrically insulating film so as to provide said heater and electrodes.
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17. A gas detector, comprising:
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(a) a substrate, (b) at least one recess formed in said substrate, (c) an electrically insulating film which is formed to bridge said recess at the portion at which is formed a heater for detecting a gas, (d) an electrically conductive film which is formed on said electrically insulating film so as to provide said heater and electrodes, and (e) a catalytic film which is formed over said heater of said electrically conductive film.
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Specification