Method for fabricating a semiconductor device

• US 4,352,834 A
• Filed: 12/04/1980
• Issued: 10/05/1982
• Est. Priority Date: 12/26/1979
• Status: Expired due to Term

• Current Assignee: Nippon Hoso Kyokai
• Original Assignee: Nippon Hoso Kyokai
• Inventors: Ogusu, Chihaya, Taketoshi, Kazuhisa
• Primary Examiner(s): Hoffman, James R.
• Application Number:
  US06/213,016
• Time in Patent Office: 670 Days
• Field of Search: 427/38, 427/74, 427/76, 427/87
• US Class Current: 427/566
• CPC Class Codes: C23C 14/0021 Reactive sputtering or evaporation
• CPC Class Codes: H01L 21/02422 Non-crystalline insulating materials, e.g. glass, polymers
• CPC Class Codes: H01L 21/02474 Sulfides
• CPC Class Codes: H01L 21/02477 Selenides
• CPC Class Codes: H01L 21/0248 Tellurides
• CPC Class Codes: H01L 21/02631 Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
• CPC Class Codes: H01L 31/18 Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Abstract

In a vacuum container an active (or atomic state) gas consisting of either one of active hydrogen, active oxygen and active nitrogen with a partial pressure of 1×10^-3 Torr or less is produced. In an atmosphere of the active (or atomic state) gas, a film, which consists of a compound presenting semiconductor characteristics (CdS, CdSe, ZnSe, ZnS, ZnTe, CdTe) or a solid solution thereof and presents a desired polarity property such as p, n, p⁺ or n⁺, is vapor-deposited on a substrate at a desired position with a desired thickness, so as to fabricate an evaporation device which is preferable, for example, as a photoconductive target for a television camera tube.

Claims

1. A method for depositing a film onto a substrate utilizing evaporation comprising the steps of

forming an atmosphere containing an atomic state gas selected from a group consisting of hydrogen, oxygen and nitrogen with a partial pressure of 1×

10^-3 Torr or less, in a vacuum container, and

depositing a film consisting of a compound presenting semiconductor characteristics or a solid solution thereof on a substrate in said atmosphere to form a film on said substrate.

2. The method of claim 1, wherein said method includes the steps of

introducing a gas selected from a group consisting of hydrogen gas, oxygen gas and nitrogen gas into said vacuum container with a pressure of 1 Torr or less,

conducting a current in a range from 0.01 mA to 1 mA in said vacuum container by a high speed electron beam accelerated by an accelerating voltage in a range from 500 V to 3,000 V, so that the introduced gas is converted to said atomic state gas,

adjusting the pressure of said introduced gas containing said atomic state gas at 1×

10^-3 Torr or less, and

depositing said film consisting of said compound presenting the semiconductor characteristics or said solid solution thereof on said substrate in said atmosphere.

3. The method of claim 1, wherein said compound presenting the semiconductor characteristics or said solid solution thereof has a hetero junction formed by materials having components including elements belonging to groups IIb and VIb in the periodic table.

4. The method of claim 3, wherein said hetero junction between groups IIb and VIb is formed by a semiconductor compound selected from a group consisting of CdS, CdSe, ZnSe, ZnS, ZnTe and CdTe or a solid solution thereof.

5. The method as claimed in claim 1, wherein said deposited film is formed by CdTe or ZnTe or a solid solution thereof and said atomic state gas is hydrogen, so as to form a film presenting p-type semiconductor characteristics in which a Fermi level exists in the vicinity of a center of a forbidden band.

6. The method of claim 1, wherein said deposited film is formed by CdTe or ZnTe or a solid solution thereof and said atomic state gas is oxygen, so as to form a film presenting p⁺ type semiconductor characteristics in which a Fermi level exists in the vicinity of a full band.

7. The method of claim 1, wherein said deposited film is formed by a semiconductor compound selected from a group consisting of CdS, CdSe, ZnS and ZnSe or a solid solution thereof and said atomic state gas is oxygen, so as to form a film presenting n-type semiconductor characteristics in which a Fermi level exists in the vicinity of a center of a forbidden band.

8. The method of claim 1, wherein said deposited film is formed by a semiconductor compound selected from a group consisting of CdS, CdSe, ZnS and ZnSe or a solid solution thereof and said atomic state gas is hydrogen, so as to form a film presenting n⁺ type semiconductor characteristics in which a Fermi level exists in the vicinity of a conduction band.

9. The method of claim 1, wherein said film presenting semiconductor characteristics is deposited on said substrate in an order of either from a p-type layer to an n-type layer or from an n-type layer to a p-type layer.

10. The method of claim 1, wherein said film presenting semiconductor characteristics is deposited on said substrate in an order of either p-n-p layers or n-p-n layers.

11. The method of claim 1 wherein the step of forming an atmosphere of an atomic state gas comprises the steps of:

introducing a gas selected from a group consisting of hydrogen, oxygen or nitrogen into said vacuum container;

conducting a current in a said vacuum container utilizing a high speed electron beam so that the introduced gas is at last partially converted to atoms so as to form an atomic state gas.

12. The method of claim 11 wherein said film deposited in said depositing step comprises a series of film layers arranged in a sequence beginning from the closest layer to the substrate having the order of p⁺ -p-i-n-n⁺.

13. The method of claim 11 wherein said film deposited in said depositing step comprises a series of film layers arranged in a sequence beginning from the closest layer to the substrate having the order of n⁺ -n-i-p-p⁺.

14. The method of claim 12 or 13 wherein said p⁺ -type and p-type film layers are developed from the evaporation and crystallization of a p-type material selected from the group consisting of CdTe and ZnTe.

15. The method of claim 12 or 13 wherein said n⁺ -type and n-type film layers are developed from the evaporation and crystallization of a n-type material selected from the group consisting of CdSe, CdS, ZnS, ZnSe.

16. The method of claim 12 or 13 wherein said film is adapted to form a photoconductive target on said substrate.